Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy
An actuatable capacitive transducer including a transducer body, a first capacitor including a displaceable electrode and electrically configured as an electrostatic actuator, and a second capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor, wherein the second capacitor comprises a multi-plate capacitor. The actuatable capacitive transducer further includes a coupling shaft configured to mechanically couple the displaceable electrode of the first capacitor to the displaceable electrode of the second capacitor to form a displaceable electrode unit which is displaceable relative to the transducer body, and an electrically-conductive indenter mechanically coupled to the coupling shaft so as to be displaceable in unison with the displaceable electrode unit.
- Research Organization:
- Hysitron, Inc. (Minneapolis, MN)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- FG02-04ER83979
- Assignee:
- Hysitron, Inc. (Minneapolis, MN)
- Patent Number(s):
- 8,453,498
- Application Number:
- 12/886,745
- OSTI ID:
- 1084371
- Country of Publication:
- United States
- Language:
- English
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