Micro/nano devices fabricated from Cu-Hf thin films

Luber, Erik J; Ophus, Colin; Mitlin, David; Olsen, Brian; Harrower, Christopher; Radmilovi, Velimir

Micro/nano devices fabricated from Cu-Hf thin films

Patent · 04 June 2013

OSTI ID:1084331

Luber, Erik J; Ophus, Colin; Mitlin, David; Olsen, Brian; Harrower, Christopher; Radmilovi, Velimir

An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States); Univ. of Alberta, Edmonton, AB (Canada)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC02-05CH11231

Assignee:: The Governors of the University of Alberta (Edmonton, AB); The Regents of the University of California (Oakland, CA)

Patent Number(s):: 8,458,811

Application Number:: 13/072,343

OSTI ID:: 1084331

Country of Publication:: United States

Language:: English

References (42)

Electronic Effects in the Elastic Constants of n -Type Silicon Hall, John J. Physical Review, Vol. 161, Issue 3 https://doi.org/10.1103/PhysRev.161.756	journal	September 1967
Glass forming ability: Miedema approach to (Zr, Ti, Hf)–(Cu, Ni) binary and ternary alloys Basu, Joysurya; Murty, B. S.; Ranganathan, S. Journal of Alloys and Compounds, Vol. 465, Issue 1-2 https://doi.org/10.1016/j.jallcom.2007.10.131	journal	October 2008
Conductive polymer patterned media fabricated by diblock copolymer lithography for scanning multiprobe data storage Yoshida, Shinya; Ono, Takahito; Esashi, Masayoshi Nanotechnology, Vol. 19, Issue 47 https://doi.org/10.1088/0957-4484/19/47/475302	journal	October 2008
High copper content bulk glass formation in bimetallic Cu-Hf system Duan, Gang; Xu, Donghua; Johnson, William L. Metallurgical and Materials Transactions A, Vol. 36, Issue 2 https://doi.org/10.1007/s11661-005-0316-8	journal	February 2005
Thermomechanical writing with an atomic force microscope tip Mamin, H. J.; Rugar, D. Applied Physics Letters, Vol. 61, Issue 8 https://doi.org/10.1063/1.108460	journal	August 1992
Nanomechanical and nanotribological characterization of noble metal-coated AFM tips for probe-based ferroelectric data recording Palacio, Manuel; Bhushan, Bharat Nanotechnology, Vol. 19, Issue 10 https://doi.org/10.1088/0957-4484/19/10/105705	journal	February 2008
Metallic NEMS components fabricated from nanocomposite Al–Mo films Lee, Z.; Ophus, C.; Fischer, L. M. Nanotechnology, Vol. 17, Issue 12 https://doi.org/10.1088/0957-4484/17/12/042	journal	June 2006
Improved atomic force microscope images using microcantilevers with sharp tips Akamine, S.; Barrett, R. C.; Quate, C. F. Applied Physics Letters, Vol. 57, Issue 3 https://doi.org/10.1063/1.103677	journal	July 1990
Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications Luber, E.; Mohammadi, R.; Ophus, C. Nanotechnology, Vol. 19, Issue 12 https://doi.org/10.1088/0957-4484/19/12/125705	journal	February 2008
New approaches to atomic force microscope lithography on silicon Birkelund, K. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 6 https://doi.org/10.1116/1.589753	journal	November 1997
Reevaluation of the Cu–Hf binary system Liang, Dong; Liu, Yajun Journal of Alloys and Compounds, Vol. 426, Issue 1-2 https://doi.org/10.1016/j.jallcom.2006.02.013	journal	December 2006
Structural Aspects of the Electrical Resistivity of Binary Alloys Bhatia, A. B.; Thornton, D. E. Physical Review B, Vol. 2, Issue 8 https://doi.org/10.1103/PhysRevB.2.3004	journal	October 1970
Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology Oliver, W. C.; Pharr, G. M. Journal of Materials Research, Vol. 19, Issue 1 https://doi.org/10.1557/jmr.2004.19.1.3	journal	January 2004
Towards wet anisotropic silicon etching of perfect pyramidal pits Sarajlic, Edin; Yamahata, Christophe; Fujita, Hiroyuki Microelectronic Engineering, Vol. 84, Issue 5-8 https://doi.org/10.1016/j.mee.2007.01.250	journal	May 2007
Thermomechanical Formation and Recovery of Nanoindents in a Shape Memory Polymer Studied Using a Heated Tip Yang, Fuzheng; Wornyo, Edem; Gall, Ken Scanning, Vol. 30, Issue 2 https://doi.org/10.1002/sca.20074	journal	January 2008
Measurements of stress during vapor deposition of copper and silver thin films and multilayers Shull, Alison L.; Spaepen, Frans Journal of Applied Physics, Vol. 80, Issue 11 https://doi.org/10.1063/1.363701	journal	December 1996
Single-step electrochemical nanolithography of metal thin films by localized etching with an AFM tip de Abril, O.; Gündel, A.; Maroun, F. Nanotechnology, Vol. 19, Issue 32 https://doi.org/10.1088/0957-4484/19/32/325301	journal	July 2008
All-metal AFM probes fabricated from microstructurally tailored Cu–Hf thin films Luber, E. J.; Olsen, B. C.; Ophus, C. Nanotechnology, Vol. 20, Issue 34 https://doi.org/10.1088/0957-4484/20/34/345703	journal	August 2009
Local atomic structure in disordered and nanocrystalline catalytic materials Dmowski, Wojtek; Egami, Takeshi; Swider-Lyons, Karen E. Zeitschrift für Kristallographie - Crystalline Materials, Vol. 222, Issue 11 https://doi.org/10.1524/zkri.2007.222.11.617	journal	November 2007
Degeneracy and instability of nanocontacts between conductive tips and hydrogenated nanocrystalline Si surfaces in conductive atomic force microscopy Cavalcoli, Daniela; Rossi, Marco; Tomasi, Andrea Nanotechnology, Vol. 20, Issue 4 https://doi.org/10.1088/0957-4484/20/4/045702	journal	December 2008
A mould-and-transfer technology for fabricating scanning probe microscopy probes Zou, Jun; Wang, Xuefeng; Bullen, David Journal of Micromechanics and Microengineering, Vol. 14, Issue 2 https://doi.org/10.1088/0960-1317/14/2/006	journal	October 2003
Microfabrication of cantilever styli for the atomic force microscope Albrecht, T. R.; Akamine, S.; Carver, T. E. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 8, Issue 4 https://doi.org/10.1116/1.576520	journal	July 1990
Etch rates for micromachining processing-part II Williams, K.R.; Gupta, K.; Wasilik, M. Journal of Microelectromechanical Systems, Vol. 12, Issue 6, p. 761-778 https://doi.org/10.1109/JMEMS.2003.820936	journal	December 2003
Surface Characterization of Cu−M (M = Ti, Zr, or Hf) Alloy Powder Catalysts Molnár, Árpád; Bertóti, Imre; Szépvölgyi, János The Journal of Physical Chemistry B, Vol. 102, Issue 46 https://doi.org/10.1021/jp982209t	journal	October 1998
Thermodynamic assessment of the copper-hafnium system Turchanin, M. A.; Agraval, P. G. Powder Metallurgy and Metal Ceramics, Vol. 47, Issue 3-4 https://doi.org/10.1007/s11106-008-9008-4	journal	March 2008
Integrity of copper–hafnium, hafnium nitride and multilayered amorphous-like hafnium nitride metallization under various thickness Ou, Keng-Liang Microelectronic Engineering, Vol. 83, Issue 2 https://doi.org/10.1016/j.mee.2005.09.008	journal	February 2006
Temperature dependence of the thermodynamic functions of strongly interacting liquid alloys Singh, R. N.; Sommer, F. Journal of Physics: Condensed Matter, Vol. 4, Issue 24 https://doi.org/10.1088/0953-8984/4/24/004	journal	June 1992
Studies of multilayers of Cu-Hf with a variable-energy positron beam Matsubara, H.; Yamamoto, Y.; Kanazawa, I. Hyperfine Interactions, Vol. 84, Issue 1 https://doi.org/10.1007/BF02060657	journal	December 1994
Microfabricated small metal cantilevers with silicon tip for atomic force microscopy Chand, A.; Viani, M. B.; Schaffer, T. E. Journal of Microelectromechanical Systems, Vol. 9, Issue 1 https://doi.org/10.1109/84.825785	journal	March 2000
Atomic packing and short-to-medium-range order in metallic glasses Sheng, H. W.; Luo, W. K.; Alamgir, F. M. Nature, Vol. 439, Issue 7075 https://doi.org/10.1038/nature04421	journal	January 2006
Three-dimensional design and replication of silicon oxide nanostructures using an atomic force microscope Johannes, Matthew S.; Cole, Daniel G.; Clark, Robert L. Nanotechnology, Vol. 18, Issue 34 https://doi.org/10.1088/0957-4484/18/34/345304	journal	July 2007
Improvement of thermally induced bending of cantilevers used for atomic force microscopy Radmacher, M.; Cleveland, J. P.; Hansma, P. K. Scanning, Vol. 17, Issue 2 https://doi.org/10.1002/sca.4950170208	journal	March 1995
Bulk metallic glasses with large plasticity: Composition design from the structural perspective Zhang, Li; Cheng, Yong-Qiang; Cao, A-Jing Acta Materialia, Vol. 57, Issue 4 https://doi.org/10.1016/j.actamat.2008.11.002	journal	February 2009
Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications Steen, J. A. J.; Hayakawa, J.; Harada, T. Nanotechnology, Vol. 17, Issue 5 https://doi.org/10.1088/0957-4484/17/5/050	journal	February 2006
Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al–32at.%Mo amorphous-nanocrystalline metallic composites Ophus, C.; Nelson Fitzpatrick, N.; Lee, Z. Applied Physics Letters, Vol. 92, Issue 12 https://doi.org/10.1063/1.2841849	journal	March 2008
First-principles calculations of structural energetics of Cu–TM (TM=Ti, Zr, Hf) intermetallics Ghosh, G. Acta Materialia, Vol. 55, Issue 10 https://doi.org/10.1016/j.actamat.2007.01.037	journal	June 2007
Stress and grain growth in thin films Thompson, Carl V.; Carel, Roland Journal of the Mechanics and Physics of Solids, Vol. 44, Issue 5 https://doi.org/10.1016/0022-5096(96)00022-1	journal	May 1996
XRD Measurement of Mean Crystallite Thickness of Illite and Illite/Smectite: Reappraisal of the Kubler Index and the Scherrer Equation Drits, Victor Clays and Clay Minerals, Vol. 45, Issue 3 https://doi.org/10.1346/CCMN.1997.0450315	journal	January 1997
Thermally-treated Pt-coated silicon AFM tips for wear resistance in ferroelectric data storage Bhushan, Bharat; Palacio, Manuel; Kwak, Kwang Joo Acta Materialia, Vol. 56, Issue 16 https://doi.org/10.1016/j.actamat.2008.04.052	journal	September 2008
Surface Studies by Scanning Tunneling Microscopy Binnig, G.; Rohrer, H.; Gerber, Ch. Physical Review Letters, Vol. 49, Issue 1 https://doi.org/10.1103/PhysRevLett.49.57	journal	July 1982
Interfaces and stresses in thin films Spaepen, F. Acta Materialia, Vol. 48, Issue 1 https://doi.org/10.1016/S1359-6454(99)00286-4	journal	January 2000
Temperature and pressure dependence of resonance in multi-layer microcantilevers Sandberg, R.; Svendsen, W.; Mølhave, K. Journal of Micromechanics and Microengineering, Vol. 15, Issue 8 https://doi.org/10.1088/0960-1317/15/8/011	journal	June 2005

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