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Title: Micro/nano devices fabricated from Cu-Hf thin films

Abstract

An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.

Inventors:
; ; ; ; ;
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1084331
Patent Number(s):
8,458,811
Application Number:
13/072,343
Assignee:
The Governors of the University of Alberta (Edmonton, Alberta, CA); The Regents of the University of California (Oakland, CA)
DOE Contract Number:  
AC02-05CH11231
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Luber, Erik J, Ophus, Colin, Mitlin, David, Olsen, Brian, Harrower, Christopher, and Radmilovi, Velimir. Micro/nano devices fabricated from Cu-Hf thin films. United States: N. p., 2013. Web.
Luber, Erik J, Ophus, Colin, Mitlin, David, Olsen, Brian, Harrower, Christopher, & Radmilovi, Velimir. Micro/nano devices fabricated from Cu-Hf thin films. United States.
Luber, Erik J, Ophus, Colin, Mitlin, David, Olsen, Brian, Harrower, Christopher, and Radmilovi, Velimir. 2013. "Micro/nano devices fabricated from Cu-Hf thin films". United States. https://www.osti.gov/servlets/purl/1084331.
@article{osti_1084331,
title = {Micro/nano devices fabricated from Cu-Hf thin films},
author = {Luber, Erik J and Ophus, Colin and Mitlin, David and Olsen, Brian and Harrower, Christopher and Radmilovi, Velimir},
abstractNote = {An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.},
doi = {},
url = {https://www.osti.gov/biblio/1084331}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {6}
}