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Title: Method and system for laser-based formation of micro-shapes in surfaces of optical elements

Abstract

A method of forming a surface feature extending into a sample includes providing a laser operable to emit an output beam and modulating the output beam to form a pulse train having a plurality of pulses. The method also includes a) directing the pulse train along an optical path intersecting an exposed portion of the sample at a position i and b) focusing a first portion of the plurality of pulses to impinge on the sample at the position i. Each of the plurality of pulses is characterized by a spot size at the sample. The method further includes c) ablating at least a portion of the sample at the position i to form a portion of the surface feature and d) incrementing counter i. The method includes e) repeating steps a) through d) to form the surface feature. The sample is free of a rim surrounding the surface feature.

Inventors:
;
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1083453
Patent Number(s):
8,389,889
Application Number:
12/818,094
Assignee:
Lawrence Livermore National Security, LLC (Livermore, CA)
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 36 MATERIALS SCIENCE

Citation Formats

Bass, Isaac Louis, and Guss, Gabriel Mark. Method and system for laser-based formation of micro-shapes in surfaces of optical elements. United States: N. p., 2013. Web.
Bass, Isaac Louis, & Guss, Gabriel Mark. Method and system for laser-based formation of micro-shapes in surfaces of optical elements. United States.
Bass, Isaac Louis, and Guss, Gabriel Mark. Tue . "Method and system for laser-based formation of micro-shapes in surfaces of optical elements". United States. https://www.osti.gov/servlets/purl/1083453.
@article{osti_1083453,
title = {Method and system for laser-based formation of micro-shapes in surfaces of optical elements},
author = {Bass, Isaac Louis and Guss, Gabriel Mark},
abstractNote = {A method of forming a surface feature extending into a sample includes providing a laser operable to emit an output beam and modulating the output beam to form a pulse train having a plurality of pulses. The method also includes a) directing the pulse train along an optical path intersecting an exposed portion of the sample at a position i and b) focusing a first portion of the plurality of pulses to impinge on the sample at the position i. Each of the plurality of pulses is characterized by a spot size at the sample. The method further includes c) ablating at least a portion of the sample at the position i to form a portion of the surface feature and d) incrementing counter i. The method includes e) repeating steps a) through d) to form the surface feature. The sample is free of a rim surrounding the surface feature.},
doi = {},
url = {https://www.osti.gov/biblio/1083453}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {3}
}

Patent:

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