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Title: Method to determine thermal profiles of nanoscale circuitry

Abstract

A platform that can measure the thermal profiles of devices with nanoscale resolution has been developed. The system measures the local temperature by using an array of nanoscale thermometers. This process can be observed in real time using a high resolution imagining technique such as electron microscopy. The platform can operate at extremely high temperatures.

Inventors:
;
Publication Date:
Research Org.:
LBNL (Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States))
Sponsoring Org.:
USDOE
OSTI Identifier:
1083268
Patent Number(s):
8,433,536
Application Number:
12/526,714
Assignee:
The Regents of the University of California (Oakland, CA)
DOE Contract Number:  
AC02-05CH11231
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Zettl, Alexander K, and Begtrup, Gavi E. Method to determine thermal profiles of nanoscale circuitry. United States: N. p., 2013. Web.
Zettl, Alexander K, & Begtrup, Gavi E. Method to determine thermal profiles of nanoscale circuitry. United States.
Zettl, Alexander K, and Begtrup, Gavi E. Tue . "Method to determine thermal profiles of nanoscale circuitry". United States. https://www.osti.gov/servlets/purl/1083268.
@article{osti_1083268,
title = {Method to determine thermal profiles of nanoscale circuitry},
author = {Zettl, Alexander K and Begtrup, Gavi E},
abstractNote = {A platform that can measure the thermal profiles of devices with nanoscale resolution has been developed. The system measures the local temperature by using an array of nanoscale thermometers. This process can be observed in real time using a high resolution imagining technique such as electron microscopy. The platform can operate at extremely high temperatures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {4}
}

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Works referenced in this record:

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