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Title: Ultra-high density diffraction grating

Abstract

A diffraction grating structure having ultra-high density of grooves comprises an echellette substrate having periodically repeating recessed features, and a multi-layer stack of materials disposed on the echellette substrate. The surface of the diffraction grating is planarized, such that layers of the multi-layer stack form a plurality of lines disposed on the planarized surface of the structure in a periodical fashion, wherein lines having a first property alternate with lines having a dissimilar property on the surface of the substrate. For example, in one embodiment, lines comprising high-Z and low-Z materials alternate on the planarized surface providing a structure that is suitable as a diffraction grating for EUV and soft X-rays. In some embodiments, line density of between about 10,000 lines/mm to about 100,000 lines/mm is provided.

Inventors:
; ; ; ;
Publication Date:
Research Org.:
The Regents of the University of California (Oakland, CA)
Sponsoring Org.:
USDOE
OSTI Identifier:
1082356
Patent Number(s):
8,331,027
Application Number:
12/510,900
Assignee:
The Regents of the University of California (Oakland, CA) OSTI
DOE Contract Number:  
AC02-05CH11231
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Padmore, Howard A., Voronov, Dmytro L., Cambie, Rossana, Yashchuk, Valeriy V., and Gullikson, Eric M. Ultra-high density diffraction grating. United States: N. p., 2012. Web.
Padmore, Howard A., Voronov, Dmytro L., Cambie, Rossana, Yashchuk, Valeriy V., & Gullikson, Eric M. Ultra-high density diffraction grating. United States.
Padmore, Howard A., Voronov, Dmytro L., Cambie, Rossana, Yashchuk, Valeriy V., and Gullikson, Eric M. Tue . "Ultra-high density diffraction grating". United States. https://www.osti.gov/servlets/purl/1082356.
@article{osti_1082356,
title = {Ultra-high density diffraction grating},
author = {Padmore, Howard A. and Voronov, Dmytro L. and Cambie, Rossana and Yashchuk, Valeriy V. and Gullikson, Eric M.},
abstractNote = {A diffraction grating structure having ultra-high density of grooves comprises an echellette substrate having periodically repeating recessed features, and a multi-layer stack of materials disposed on the echellette substrate. The surface of the diffraction grating is planarized, such that layers of the multi-layer stack form a plurality of lines disposed on the planarized surface of the structure in a periodical fashion, wherein lines having a first property alternate with lines having a dissimilar property on the surface of the substrate. For example, in one embodiment, lines comprising high-Z and low-Z materials alternate on the planarized surface providing a structure that is suitable as a diffraction grating for EUV and soft X-rays. In some embodiments, line density of between about 10,000 lines/mm to about 100,000 lines/mm is provided.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 11 00:00:00 EST 2012},
month = {Tue Dec 11 00:00:00 EST 2012}
}

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