Raman Thermometry and Thermal Modeling of Highly-Doped Silicon-on-Insulator Joule-Heated MEMS Bridges under Varying Gas Pressures.
Conference
·
OSTI ID:1073339
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1073339
- Report Number(s):
- SAND2012-5444C
- Resource Relation:
- Conference: Proposed for presentation at the ASME Summer Heat Transfer Conference held July 8-12, 2012 in Rio Grande, PR.
- Country of Publication:
- United States
- Language:
- English
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