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Title: Soft Embossing of Nanoscale Optical and Plasmonic Structures in Glass

Abstract

We describe here soft nanofabrication methods using spin-on glass (SOG) materials for the fabrication of both bulk materials and replica masters. The precision of soft nanofabrication using SOG is tested using features on size scales ranging from 0.6 nm to 1.0 μm. The performance of the embossed optics is tested quantitatively via replica patterning of new classes of plasmonic crystals formed by soft nanoimprinting of SOG. These crystals are found to offer significant improvements over previously reported plasmonic crystals fabricated using embossed polymeric substrate materials in several ways. The SOG structures are shown to be particularly robust, being stable in organic solvent environments and at high temperatures (~450 °C), thus extending the capacities and scope of plasmonic crystal applications to sensing in these environments. They also provide a stable, and particularly high-performance, platform for surface-enhanced Raman scattering. We further illustrate that SOG embossed nanostructures can serve as regenerable masters for the fabrication of plasmonic crystals. Perhaps most significantly, we show how the design rules of plasmonic crystals replicated from a single master can be tuned during the embossing steps of the fabrication process to provide useful modifications of their optical responses. We illustrate how the strongest feature in the transmissionmore » spectrum of a plasmonic crystal formed using a single SOG master can be shifted precisely in a SOG replica between 700 and 900 nm for an exemplary design of a full 3D plasmonic crystal by careful manipulation of the process parameters used to fabricate the optical device.« less

Authors:
 [1];  [1];  [2];  [3];  [4];  [5];  [2];  [6];  [6]
  1. Univ. of Illinois, Urbana, IL (United States). Dept. of Chemistry
  2. Univ. of Illinois, Urbana, IL (United States). Dept. of Bioengineering and Beckman Inst. for Advanced Science and Technology
  3. Univ. of Illinois, Urbana, IL (United States). Dept. of Materials Science and Engineering, Frederick Seitz Materials Research Lab. (FS-MRL)
  4. Louisiana State Univ., Baton Rouge, LA (United States). Center for Computation and Technology
  5. Argonne National Lab. (ANL), Argonne, IL (United States). Center for Nanoscale Materials
  6. Univ. of Illinois, Urbana, IL (United States). Dept. of Chemistry, Dept. of Materials Science and Engineering and Frederick Seitz Materials Research Lab. (FS-MRL)
Publication Date:
Research Org.:
Energy Frontier Research Centers (EFRC); Light-Material Interactions in Energy Conversion (LMI)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1065587
DOE Contract Number:  
SC0001293
Resource Type:
Journal Article
Journal Name:
ACS Nano
Additional Journal Information:
Journal Volume: 5; Journal Issue: 7; Related Information: LMI partners with California Institute of Technology (lead); Harvard University; University of Illinois, Urbana-Champaign; Lawrence Berkeley National Laboratory; Journal ID: ISSN 1936-0851
Publisher:
American Chemical Society
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; solar (photovoltaic), solid state lighting, phonons, thermal conductivity, electrodes - solar, materials and chemistry by design, optics, synthesis (novel materials), synthesis (self-assembly)

Citation Formats

Yao, Jimin, Le, An-Phong, Schulmerich, Matthew V., Maria, Joana, Lee, Tae-Woo, Gray, Stephen K., Bhargava, Rohit, Rogers, John A., and Nuzzo, Ralph G.. Soft Embossing of Nanoscale Optical and Plasmonic Structures in Glass. United States: N. p., 2011. Web. doi:10.1021/nn201464t.
Yao, Jimin, Le, An-Phong, Schulmerich, Matthew V., Maria, Joana, Lee, Tae-Woo, Gray, Stephen K., Bhargava, Rohit, Rogers, John A., & Nuzzo, Ralph G.. Soft Embossing of Nanoscale Optical and Plasmonic Structures in Glass. United States. doi:10.1021/nn201464t.
Yao, Jimin, Le, An-Phong, Schulmerich, Matthew V., Maria, Joana, Lee, Tae-Woo, Gray, Stephen K., Bhargava, Rohit, Rogers, John A., and Nuzzo, Ralph G.. Tue . "Soft Embossing of Nanoscale Optical and Plasmonic Structures in Glass". United States. doi:10.1021/nn201464t.
@article{osti_1065587,
title = {Soft Embossing of Nanoscale Optical and Plasmonic Structures in Glass},
author = {Yao, Jimin and Le, An-Phong and Schulmerich, Matthew V. and Maria, Joana and Lee, Tae-Woo and Gray, Stephen K. and Bhargava, Rohit and Rogers, John A. and Nuzzo, Ralph G.},
abstractNote = {We describe here soft nanofabrication methods using spin-on glass (SOG) materials for the fabrication of both bulk materials and replica masters. The precision of soft nanofabrication using SOG is tested using features on size scales ranging from 0.6 nm to 1.0 μm. The performance of the embossed optics is tested quantitatively via replica patterning of new classes of plasmonic crystals formed by soft nanoimprinting of SOG. These crystals are found to offer significant improvements over previously reported plasmonic crystals fabricated using embossed polymeric substrate materials in several ways. The SOG structures are shown to be particularly robust, being stable in organic solvent environments and at high temperatures (~450 °C), thus extending the capacities and scope of plasmonic crystal applications to sensing in these environments. They also provide a stable, and particularly high-performance, platform for surface-enhanced Raman scattering. We further illustrate that SOG embossed nanostructures can serve as regenerable masters for the fabrication of plasmonic crystals. Perhaps most significantly, we show how the design rules of plasmonic crystals replicated from a single master can be tuned during the embossing steps of the fabrication process to provide useful modifications of their optical responses. We illustrate how the strongest feature in the transmission spectrum of a plasmonic crystal formed using a single SOG master can be shifted precisely in a SOG replica between 700 and 900 nm for an exemplary design of a full 3D plasmonic crystal by careful manipulation of the process parameters used to fabricate the optical device.},
doi = {10.1021/nn201464t},
journal = {ACS Nano},
issn = {1936-0851},
number = 7,
volume = 5,
place = {United States},
year = {2011},
month = {7}
}