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Title: High-Resolution PFPE-based Molding Techniques for Nanofabrication of High-Pattern Density, Sub-20 nm Features: A Fundamental Materials Approach

Abstract

Several perfluoropolyether (PFPE)-based elastomers for high-resolution replica molding applications are explored. The modulus of the elastomeric materials was increased through synthetic and additive approaches while maintaining relatively low surface tension values (<25 mN/m). Using large area (>4 in.{sup 2}) master templates, we experimentally show the relationship between mold resolution and material properties such as modulus and surface tension for materials used in this study. A composite mold approach was used to form flexible molds out of stiff, high modulus materials that allow for replication of sub-20 nm post structures. Sub-100 nm line grating master templates, formed using e-beam lithography, were used to determine the experimental stability of the molding materials. It was observed that as the feature spacing decreased, high modulus PFPE tetramethacrylate (TMA) composite molds were able to effectively replicate the nanograting structures without cracking or tear-out defects that typically occur with high modulus elastomers.

Authors:
; ; ; ; ;
Publication Date:
Research Org.:
Energy Frontier Research Centers (EFRC); Center for Solar Fuels (UNC EFRC)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1064664
DOE Contract Number:  
SC0001011
Resource Type:
Journal Article
Resource Relation:
Journal Name: Nano Letters; Journal Volume: 10; Journal Issue: 4; Related Information: UNC partners with University of North Carolina (lead); Duke University; University of Florida; Georgia Institute of Technology; University; North Carolina Central University; Research Triangle Institute
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; catalysis (homogeneous), catalysis (heterogeneous), solar (photovoltaic), solar (fuels), photosynthesis (natural and artificial), hydrogen and fuel cells, electrodes - solar, charge transport, materials and chemistry by design, synthesis (novel materials), synthesis (self-assembly)

Citation Formats

Williams, Stuart S., Retterer, Scott, Lopez, Rene, Ruiz, Ricardo, Samulski, Edward T., and DeSimone, Joseph M.. High-Resolution PFPE-based Molding Techniques for Nanofabrication of High-Pattern Density, Sub-20 nm Features: A Fundamental Materials Approach. United States: N. p., 2010. Web. doi:10.1021/nl100326q.
Williams, Stuart S., Retterer, Scott, Lopez, Rene, Ruiz, Ricardo, Samulski, Edward T., & DeSimone, Joseph M.. High-Resolution PFPE-based Molding Techniques for Nanofabrication of High-Pattern Density, Sub-20 nm Features: A Fundamental Materials Approach. United States. doi:10.1021/nl100326q.
Williams, Stuart S., Retterer, Scott, Lopez, Rene, Ruiz, Ricardo, Samulski, Edward T., and DeSimone, Joseph M.. Wed . "High-Resolution PFPE-based Molding Techniques for Nanofabrication of High-Pattern Density, Sub-20 nm Features: A Fundamental Materials Approach". United States. doi:10.1021/nl100326q.
@article{osti_1064664,
title = {High-Resolution PFPE-based Molding Techniques for Nanofabrication of High-Pattern Density, Sub-20 nm Features: A Fundamental Materials Approach},
author = {Williams, Stuart S. and Retterer, Scott and Lopez, Rene and Ruiz, Ricardo and Samulski, Edward T. and DeSimone, Joseph M.},
abstractNote = {Several perfluoropolyether (PFPE)-based elastomers for high-resolution replica molding applications are explored. The modulus of the elastomeric materials was increased through synthetic and additive approaches while maintaining relatively low surface tension values (<25 mN/m). Using large area (>4 in.{sup 2}) master templates, we experimentally show the relationship between mold resolution and material properties such as modulus and surface tension for materials used in this study. A composite mold approach was used to form flexible molds out of stiff, high modulus materials that allow for replication of sub-20 nm post structures. Sub-100 nm line grating master templates, formed using e-beam lithography, were used to determine the experimental stability of the molding materials. It was observed that as the feature spacing decreased, high modulus PFPE tetramethacrylate (TMA) composite molds were able to effectively replicate the nanograting structures without cracking or tear-out defects that typically occur with high modulus elastomers.},
doi = {10.1021/nl100326q},
journal = {Nano Letters},
number = 4,
volume = 10,
place = {United States},
year = {Wed Apr 14 00:00:00 EDT 2010},
month = {Wed Apr 14 00:00:00 EDT 2010}
}