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Title: Transparent Conducting ZnO Thin Films Doped with Al and Mo

Abstract

Transparent conducting oxide (TCO) thin films are a vital part of photovoltaic cells, flat-panel displays, and electrochromic windows. ZnO-based TCOs, due to the relative abundance of Zn, may reduce production costs compared to those of the prevalent TCO In2O3:Sn (ITO). Undoped ZnO, ZnO:Al (0.5, 1, and 2 wt.% Al2O3), and ZnO:Mo (2 wt.%) films were deposited by RF magnetron sputtering. Controlled incorporation of H2 in the Ar sputtering ambient increased mobility of undoped ZnO by a factor of ~20 to 48 cm2V-1s-1. H2 also appears to catalyze ionization of dopants. This enabled lightly doped ZnO:Al to provide comparable conductivity to the standard 2 wt.%-doped ZnO:Al while demonstrating reduced infrared absorption. Mo was found to be an n-type dopant of ZnO, though material properties did not match those of ZnO:Al. Scattering mechanisms were investigated using temperature-dependent Hall measurements and the method of four coefficients. This abstract is subject to government rights.

Authors:
; ; ; ;
Publication Date:
Research Org.:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE Office of Energy Efficiency and Renewable Energy Solar Energy Technologies Program
OSTI Identifier:
1063653
DOE Contract Number:  
AC36-08GO28308
Resource Type:
Conference
Resource Relation:
Conference: Bulletin of the American Physical Society; Related Information: Abstract D39.00009
Country of Publication:
United States
Language:
English
Subject:
14 SOLAR ENERGY; 36 MATERIALS SCIENCE; Solar Energy - Photovoltaics

Citation Formats

Duenow, J., Gessert, T., Wood, D., Young, D., and Coutts, T.. Transparent Conducting ZnO Thin Films Doped with Al and Mo. United States: N. p., 2007. Web.
Duenow, J., Gessert, T., Wood, D., Young, D., & Coutts, T.. Transparent Conducting ZnO Thin Films Doped with Al and Mo. United States.
Duenow, J., Gessert, T., Wood, D., Young, D., and Coutts, T.. Mon . "Transparent Conducting ZnO Thin Films Doped with Al and Mo". United States. doi:.
@article{osti_1063653,
title = {Transparent Conducting ZnO Thin Films Doped with Al and Mo},
author = {Duenow, J. and Gessert, T. and Wood, D. and Young, D. and Coutts, T.},
abstractNote = {Transparent conducting oxide (TCO) thin films are a vital part of photovoltaic cells, flat-panel displays, and electrochromic windows. ZnO-based TCOs, due to the relative abundance of Zn, may reduce production costs compared to those of the prevalent TCO In2O3:Sn (ITO). Undoped ZnO, ZnO:Al (0.5, 1, and 2 wt.% Al2O3), and ZnO:Mo (2 wt.%) films were deposited by RF magnetron sputtering. Controlled incorporation of H2 in the Ar sputtering ambient increased mobility of undoped ZnO by a factor of ~20 to 48 cm2V-1s-1. H2 also appears to catalyze ionization of dopants. This enabled lightly doped ZnO:Al to provide comparable conductivity to the standard 2 wt.%-doped ZnO:Al while demonstrating reduced infrared absorption. Mo was found to be an n-type dopant of ZnO, though material properties did not match those of ZnO:Al. Scattering mechanisms were investigated using temperature-dependent Hall measurements and the method of four coefficients. This abstract is subject to government rights.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2007},
month = {Mon Jan 01 00:00:00 EST 2007}
}

Conference:
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