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Title: DEPOSITION OF NIOBIUM AND OTHER SUPERCONDUCTING MATERIALS WITH HIGH POWER IMPULSE MAGNETRON SPUTTERING: CONCEPT AND FIRST RESULTS

Abstract

Niobium coatings on copper cavities have been considered as a cost-efficient replacement of bulk niobium RF cavities, however, coatings made by magnetron sputtering have not quite lived up to high expectations due to Q-slope and other issues. High power impulse magnetron sputtering (HIPIMS) is a promising emerging coatings technology which combines magnetron sputtering with a pulsed power approach. The magnetron is turned into a metal plasma source by using very high peak power density of ~ 1 kW/cm{sup 2}. In this contribution, the cavity coatings concept with HIPIMS is explained. A system with two cylindrical, movable magnetrons was set up with custom magnetrons small enough to be inserted into 1.3 GHz cavities. Preliminary data on niobium HIPIMS plasma and the resulting coatings are presented. The HIPIMS approach has the potential to be extended to film systems beyond niobium, including other superconducting materials and/or multilayer systems.

Authors:
; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
Accelerator& Fusion Research Division
OSTI Identifier:
1055778
Report Number(s):
LBNL-5275E
DOE Contract Number:  
DE-AC02-05CH11231
Resource Type:
Conference
Resource Relation:
Conference: 15th International Conference on RF Superconductivity (SRF 2011), Chicago, IL, 25-29 July 2011
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; high power impulse magnetron sputtering, superconducting films, niobium

Citation Formats

High Current Electronics Institute, Tomsk, Russia, Anders, Andre, Mendelsberg, Rueben J., Lim, Sunnie, Mentink, Matthijs, Slack, Jonathan L., Wallig, Joseph G., Nollau, Alexander V., and Yushkov, Georgy Yu. DEPOSITION OF NIOBIUM AND OTHER SUPERCONDUCTING MATERIALS WITH HIGH POWER IMPULSE MAGNETRON SPUTTERING: CONCEPT AND FIRST RESULTS. United States: N. p., 2011. Web.
High Current Electronics Institute, Tomsk, Russia, Anders, Andre, Mendelsberg, Rueben J., Lim, Sunnie, Mentink, Matthijs, Slack, Jonathan L., Wallig, Joseph G., Nollau, Alexander V., & Yushkov, Georgy Yu. DEPOSITION OF NIOBIUM AND OTHER SUPERCONDUCTING MATERIALS WITH HIGH POWER IMPULSE MAGNETRON SPUTTERING: CONCEPT AND FIRST RESULTS. United States.
High Current Electronics Institute, Tomsk, Russia, Anders, Andre, Mendelsberg, Rueben J., Lim, Sunnie, Mentink, Matthijs, Slack, Jonathan L., Wallig, Joseph G., Nollau, Alexander V., and Yushkov, Georgy Yu. Sun . "DEPOSITION OF NIOBIUM AND OTHER SUPERCONDUCTING MATERIALS WITH HIGH POWER IMPULSE MAGNETRON SPUTTERING: CONCEPT AND FIRST RESULTS". United States. https://www.osti.gov/servlets/purl/1055778.
@article{osti_1055778,
title = {DEPOSITION OF NIOBIUM AND OTHER SUPERCONDUCTING MATERIALS WITH HIGH POWER IMPULSE MAGNETRON SPUTTERING: CONCEPT AND FIRST RESULTS},
author = {High Current Electronics Institute, Tomsk, Russia and Anders, Andre and Mendelsberg, Rueben J. and Lim, Sunnie and Mentink, Matthijs and Slack, Jonathan L. and Wallig, Joseph G. and Nollau, Alexander V. and Yushkov, Georgy Yu.},
abstractNote = {Niobium coatings on copper cavities have been considered as a cost-efficient replacement of bulk niobium RF cavities, however, coatings made by magnetron sputtering have not quite lived up to high expectations due to Q-slope and other issues. High power impulse magnetron sputtering (HIPIMS) is a promising emerging coatings technology which combines magnetron sputtering with a pulsed power approach. The magnetron is turned into a metal plasma source by using very high peak power density of ~ 1 kW/cm{sup 2}. In this contribution, the cavity coatings concept with HIPIMS is explained. A system with two cylindrical, movable magnetrons was set up with custom magnetrons small enough to be inserted into 1.3 GHz cavities. Preliminary data on niobium HIPIMS plasma and the resulting coatings are presented. The HIPIMS approach has the potential to be extended to film systems beyond niobium, including other superconducting materials and/or multilayer systems.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2011},
month = {7}
}

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