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Title: A New Spectrometer for Grazing Incidence X-Ray Fluorescence for the Characterization of Arsenic Implants And Hf Based High-K Layers

Authors:
; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
SLAC National Accelerator Lab., Menlo Park, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1054896
Report Number(s):
SLAC-REPRINT-2012-267
DOE Contract Number:  
AC02-76SF00515
Resource Type:
Journal Article
Journal Name:
Spectrochim.Acta B 65:429,2010
Additional Journal Information:
Journal Name: Spectrochim.Acta B 65:429,2010
Country of Publication:
United States
Language:
English
Subject:
OTHER

Citation Formats

Ingerle, D., Meirer, F., Zoeger, N., Pepponi, G., Giubertoni, D., Steinhauser, G., Wobrauschek, P., Streli, C., and /SLAC. A New Spectrometer for Grazing Incidence X-Ray Fluorescence for the Characterization of Arsenic Implants And Hf Based High-K Layers. United States: N. p., 2012. Web.
Ingerle, D., Meirer, F., Zoeger, N., Pepponi, G., Giubertoni, D., Steinhauser, G., Wobrauschek, P., Streli, C., & /SLAC. A New Spectrometer for Grazing Incidence X-Ray Fluorescence for the Characterization of Arsenic Implants And Hf Based High-K Layers. United States.
Ingerle, D., Meirer, F., Zoeger, N., Pepponi, G., Giubertoni, D., Steinhauser, G., Wobrauschek, P., Streli, C., and /SLAC. Wed . "A New Spectrometer for Grazing Incidence X-Ray Fluorescence for the Characterization of Arsenic Implants And Hf Based High-K Layers". United States.
@article{osti_1054896,
title = {A New Spectrometer for Grazing Incidence X-Ray Fluorescence for the Characterization of Arsenic Implants And Hf Based High-K Layers},
author = {Ingerle, D. and Meirer, F. and Zoeger, N. and Pepponi, G. and Giubertoni, D. and Steinhauser, G. and Wobrauschek, P. and Streli, C. and /SLAC},
abstractNote = {},
doi = {},
journal = {Spectrochim.Acta B 65:429,2010},
number = ,
volume = ,
place = {United States},
year = {2012},
month = {11}
}