skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Plasma etching of cavities into diamond anvils for experiments at high pressures and high temperatures

Abstract

We describe a method for precisely etching small cavities into the culets of diamond anvils for the purpose of providing thermal insulation for samples in experiments at high pressures and high temperatures. The cavities were fabricated using highly directional oxygen plasma to reactively etch into the diamond surface. The lateral extent of the etch was precisely controlled to micron accuracy by etching the diamond through a lithographically fabricated tungsten mask. The performance of the etched cavities in high-temperature experiments in which the samples were either laser heated or electrically heated is discussed.

Authors:
; ; ; ; ; ;  [1];  [2]
  1. (LLNL)
  2. (
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
Sponsoring Org.:
NSFDOE - BASIC ENERGY SCIENCES
OSTI Identifier:
1049567
Resource Type:
Journal Article
Journal Name:
High Pressure Res.
Additional Journal Information:
Journal Volume: 31; Journal Issue: (1) ; 03, 2011; Journal ID: ISSN 0895-7959
Country of Publication:
United States
Language:
ENGLISH
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ACCURACY; CAVITIES; DIAMONDS; ETCHING; LASERS; OXYGEN; PERFORMANCE; PLASMA; THERMAL INSULATION; TUNGSTEN

Citation Formats

Weir, S.T., Cynn, H., Falabella, S., Evans, W.J., Aracne-Ruddle, C., Farber, D., Vohra, Y.K., and UAB). Plasma etching of cavities into diamond anvils for experiments at high pressures and high temperatures. United States: N. p., 2012. Web. doi:10.1080/08957959.2011.557073.
Weir, S.T., Cynn, H., Falabella, S., Evans, W.J., Aracne-Ruddle, C., Farber, D., Vohra, Y.K., & UAB). Plasma etching of cavities into diamond anvils for experiments at high pressures and high temperatures. United States. doi:10.1080/08957959.2011.557073.
Weir, S.T., Cynn, H., Falabella, S., Evans, W.J., Aracne-Ruddle, C., Farber, D., Vohra, Y.K., and UAB). Tue . "Plasma etching of cavities into diamond anvils for experiments at high pressures and high temperatures". United States. doi:10.1080/08957959.2011.557073.
@article{osti_1049567,
title = {Plasma etching of cavities into diamond anvils for experiments at high pressures and high temperatures},
author = {Weir, S.T. and Cynn, H. and Falabella, S. and Evans, W.J. and Aracne-Ruddle, C. and Farber, D. and Vohra, Y.K. and UAB)},
abstractNote = {We describe a method for precisely etching small cavities into the culets of diamond anvils for the purpose of providing thermal insulation for samples in experiments at high pressures and high temperatures. The cavities were fabricated using highly directional oxygen plasma to reactively etch into the diamond surface. The lateral extent of the etch was precisely controlled to micron accuracy by etching the diamond through a lithographically fabricated tungsten mask. The performance of the etched cavities in high-temperature experiments in which the samples were either laser heated or electrically heated is discussed.},
doi = {10.1080/08957959.2011.557073},
journal = {High Pressure Res.},
issn = {0895-7959},
number = (1) ; 03, 2011,
volume = 31,
place = {United States},
year = {2012},
month = {10}
}