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Title: Mechanical characterization of Lipon films using nanoindentation

Abstract

Nanoindentation has been used to characterize the elastic modulus and hardness of LiPON films ranging in thickness from 1 to 10 m. Four fully dense, amorphous films were deposited on glass and sapphire substrates with one film annealed at 200 C for 20 min. The modulus of LiPON is found to be approximately 77 GPa, and argued to be independent of the substrate type, film thickness, and annealing. Based on the numerical analysis of Monroe and Newman, this value may be sufficiently high to mechanically suppress dendrite formation at the lithium/LiPON interface in thin film batteries [1]. Using Sneddon's stiffness equation and assuming the modulus is 77 GPa, the hardness is found to be approximately 3.9 GPa for all but the annealed film. The hardness of the annealed film is approximately 5% higher, at 4.1 GPa. Atomic force microscopy images of the residual hardness impressions confirm the unexpected increase in hardness of the annealed film. Surprisingly, the indentation data also reveal time-dependent behavior in all four films. This indicates that creep may also play a significant role in determining how LiPON responds to complex loading conditions and could be important in relieving stresses as they develop during service.

Authors:
 [1];  [1];  [1]
  1. ORNL
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE Laboratory Directed Research and Development (LDRD) Program
OSTI Identifier:
1047605
DOE Contract Number:  
DE-AC05-00OR22725
Resource Type:
Journal Article
Journal Name:
Thin Solid Films
Additional Journal Information:
Journal Volume: 520; Journal Issue: 1; Journal ID: ISSN 0040-6090
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ANNEALING; ATOMIC FORCE MICROSCOPY; CREEP; DENDRITES; FLEXIBILITY; GLASS; HARDNESS; NUMERICAL ANALYSIS; SAPPHIRE; STRESSES; SUBSTRATES; THICKNESS; THIN FILMS

Citation Formats

Herbert, Erik, Tenhaeff, Wyatt E, Dudney, Nancy J, and Pharr, V, George M. Mechanical characterization of Lipon films using nanoindentation. United States: N. p., 2011. Web. doi:10.1016/j.tsf.2011.07.068.
Herbert, Erik, Tenhaeff, Wyatt E, Dudney, Nancy J, & Pharr, V, George M. Mechanical characterization of Lipon films using nanoindentation. United States. doi:10.1016/j.tsf.2011.07.068.
Herbert, Erik, Tenhaeff, Wyatt E, Dudney, Nancy J, and Pharr, V, George M. Sat . "Mechanical characterization of Lipon films using nanoindentation". United States. doi:10.1016/j.tsf.2011.07.068.
@article{osti_1047605,
title = {Mechanical characterization of Lipon films using nanoindentation},
author = {Herbert, Erik and Tenhaeff, Wyatt E and Dudney, Nancy J and Pharr, V, George M},
abstractNote = {Nanoindentation has been used to characterize the elastic modulus and hardness of LiPON films ranging in thickness from 1 to 10 m. Four fully dense, amorphous films were deposited on glass and sapphire substrates with one film annealed at 200 C for 20 min. The modulus of LiPON is found to be approximately 77 GPa, and argued to be independent of the substrate type, film thickness, and annealing. Based on the numerical analysis of Monroe and Newman, this value may be sufficiently high to mechanically suppress dendrite formation at the lithium/LiPON interface in thin film batteries [1]. Using Sneddon's stiffness equation and assuming the modulus is 77 GPa, the hardness is found to be approximately 3.9 GPa for all but the annealed film. The hardness of the annealed film is approximately 5% higher, at 4.1 GPa. Atomic force microscopy images of the residual hardness impressions confirm the unexpected increase in hardness of the annealed film. Surprisingly, the indentation data also reveal time-dependent behavior in all four films. This indicates that creep may also play a significant role in determining how LiPON responds to complex loading conditions and could be important in relieving stresses as they develop during service.},
doi = {10.1016/j.tsf.2011.07.068},
journal = {Thin Solid Films},
issn = {0040-6090},
number = 1,
volume = 520,
place = {United States},
year = {2011},
month = {1}
}