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Title: Size, effect of flexible proof mass on the mechanical behavior of micron-scale cantilevers for energy harvesting appications.

Abstract

Mechanical behavior of micron-scale cantilevers with a distributed, flexible proof mass is investigated to understand proof mass size effects on the performance of microelectromechanical system energy harvesters. Single-crystal silicon beams with proof masses of various lengths were fabricated using focused ion beam milling and tested using atomic force microscopy. Comparison of three different modeling results with measured data reveals that a 'two-beam' method has the most accurate predictive capability in terms of both resonant frequency and strain. Accurate strain prediction is essential because energy harvested scales with strain squared and maximum strain will be a design limit in fatigue.

Authors:
; ; ; ;  [1]
  1. Materials Science Division
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1035768
Report Number(s):
ANL/MSD/JA-72308
Journal ID: ISSN 0003-6951; APPLAB; TRN: US201205%%382
DOE Contract Number:  
DE-AC02-06CH11357
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 99; Journal Issue: 24; Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
ENGLISH
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ATOMIC FORCE MICROSCOPY; DESIGN; FORECASTING; HARVESTING; ION BEAMS; MILLING; PERFORMANCE; SILICON; SIMULATION; STRAINS

Citation Formats

Kim, M, Hong, S, Miller, D J, Dugundji, J, Wardle, B L, and MIT). Size, effect of flexible proof mass on the mechanical behavior of micron-scale cantilevers for energy harvesting appications.. United States: N. p., 2011. Web. doi:10.1063/1.3663858.
Kim, M, Hong, S, Miller, D J, Dugundji, J, Wardle, B L, & MIT). Size, effect of flexible proof mass on the mechanical behavior of micron-scale cantilevers for energy harvesting appications.. United States. doi:10.1063/1.3663858.
Kim, M, Hong, S, Miller, D J, Dugundji, J, Wardle, B L, and MIT). Thu . "Size, effect of flexible proof mass on the mechanical behavior of micron-scale cantilevers for energy harvesting appications.". United States. doi:10.1063/1.3663858.
@article{osti_1035768,
title = {Size, effect of flexible proof mass on the mechanical behavior of micron-scale cantilevers for energy harvesting appications.},
author = {Kim, M and Hong, S and Miller, D J and Dugundji, J and Wardle, B L and MIT)},
abstractNote = {Mechanical behavior of micron-scale cantilevers with a distributed, flexible proof mass is investigated to understand proof mass size effects on the performance of microelectromechanical system energy harvesters. Single-crystal silicon beams with proof masses of various lengths were fabricated using focused ion beam milling and tested using atomic force microscopy. Comparison of three different modeling results with measured data reveals that a 'two-beam' method has the most accurate predictive capability in terms of both resonant frequency and strain. Accurate strain prediction is essential because energy harvested scales with strain squared and maximum strain will be a design limit in fatigue.},
doi = {10.1063/1.3663858},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 24,
volume = 99,
place = {United States},
year = {2011},
month = {12}
}