Corrosion-resistant multilayer coatings for the 28-75 nm wavelength region
Conference
·
OSTI ID:1035593
Corrosion has prevented use of SiC/Mg multilayers in applications requiring good lifetime stability. We have developed Al-based barrier layers that dramatically reduce corrosion, while preserving high reflectance and low stress. The aforementioned advances may enable the implementation of corrosion-resistant, high-performance SiC/Mg coatings in the 28-75 nm region in applications such as tabletop EUV/soft x-ray laser sources and solar physics telescopes. Further study and optimization of corrosion barrier structures and coating designs is underway.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 1035593
- Report Number(s):
- LLNL-PROC-512881; TRN: US201205%%159
- Resource Relation:
- Conference: Presented at: 2011 International Workshop on EUV and Soft X-Ray Soirces, Dublin, Ireland, Nov 07 - Nov 09, 2011
- Country of Publication:
- United States
- Language:
- English
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