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Title: Corrosion-resistant multilayer coatings for the 28-75 nm wavelength region

Conference ·
OSTI ID:1035593

Corrosion has prevented use of SiC/Mg multilayers in applications requiring good lifetime stability. We have developed Al-based barrier layers that dramatically reduce corrosion, while preserving high reflectance and low stress. The aforementioned advances may enable the implementation of corrosion-resistant, high-performance SiC/Mg coatings in the 28-75 nm region in applications such as tabletop EUV/soft x-ray laser sources and solar physics telescopes. Further study and optimization of corrosion barrier structures and coating designs is underway.

Research Organization:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
W-7405-ENG-48
OSTI ID:
1035593
Report Number(s):
LLNL-PROC-512881; TRN: US201205%%159
Resource Relation:
Conference: Presented at: 2011 International Workshop on EUV and Soft X-Ray Soirces, Dublin, Ireland, Nov 07 - Nov 09, 2011
Country of Publication:
United States
Language:
English