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Title: Corrosion-resistant multilayer coatings for the 28-75 nm wavelength region

Abstract

Corrosion has prevented use of SiC/Mg multilayers in applications requiring good lifetime stability. We have developed Al-based barrier layers that dramatically reduce corrosion, while preserving high reflectance and low stress. The aforementioned advances may enable the implementation of corrosion-resistant, high-performance SiC/Mg coatings in the 28-75 nm region in applications such as tabletop EUV/soft x-ray laser sources and solar physics telescopes. Further study and optimization of corrosion barrier structures and coating designs is underway.

Authors:
; ;
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1035593
Report Number(s):
LLNL-PROC-512881
TRN: US201205%%159
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Conference
Resource Relation:
Conference: Presented at: 2011 International Workshop on EUV and Soft X-Ray Soirces, Dublin, Ireland, Nov 07 - Nov 09, 2011
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; COATINGS; CORROSION; IMPLEMENTATION; LIFETIME; OPTIMIZATION; PHYSICS; STABILITY; TELESCOPES; WAVELENGTHS; X-RAY LASERS; X-RAY SOURCES

Citation Formats

Soufli, R, Fernandez-Perea, M, and Al, E T. Corrosion-resistant multilayer coatings for the 28-75 nm wavelength region. United States: N. p., 2011. Web.
Soufli, R, Fernandez-Perea, M, & Al, E T. Corrosion-resistant multilayer coatings for the 28-75 nm wavelength region. United States.
Soufli, R, Fernandez-Perea, M, and Al, E T. Tue . "Corrosion-resistant multilayer coatings for the 28-75 nm wavelength region". United States. https://www.osti.gov/servlets/purl/1035593.
@article{osti_1035593,
title = {Corrosion-resistant multilayer coatings for the 28-75 nm wavelength region},
author = {Soufli, R and Fernandez-Perea, M and Al, E T},
abstractNote = {Corrosion has prevented use of SiC/Mg multilayers in applications requiring good lifetime stability. We have developed Al-based barrier layers that dramatically reduce corrosion, while preserving high reflectance and low stress. The aforementioned advances may enable the implementation of corrosion-resistant, high-performance SiC/Mg coatings in the 28-75 nm region in applications such as tabletop EUV/soft x-ray laser sources and solar physics telescopes. Further study and optimization of corrosion barrier structures and coating designs is underway.},
doi = {},
url = {https://www.osti.gov/biblio/1035593}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2011},
month = {11}
}

Conference:
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