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Title: Calibration of the Modulation Transfer Function of Surface Profilometers with Binary Pseudorandom Test Standards: Expanding the Application Range to Fizeau Interferometers and Electron Microscopes

Abstract

A modulation transfer function (MTF) calibration method based on binary pseudorandom (BPR) gratings and arrays has been proven to be an effective MTF calibration method for interferometric microscopes and a scatterometer. Here we report on a further expansion of the application range of the method. We describe the MTF calibration of a 6 in. phase shifting Fizeau interferometer. Beyond providing a direct measurement of the interferometer's MTF, tests with a BPR array surface have revealed an asymmetry in the instrument's data processing algorithm that fundamentally limits its bandwidth. Moreover, the tests have illustrated the effects of the instrument's detrending and filtering procedures on power spectral density measurements. The details of the development of a BPR test sample suitable for calibration of scanning and transmission electron microscopes are also presented. Such a test sample is realized as a multilayer structure with the layer thicknesses of two materials corresponding to the BPR sequence. The investigations confirm the universal character of the method that makes it applicable to a large variety of metrology instrumentation with spatial wavelength bandwidths from a few nanometers to hundreds of millimeters.

Authors:
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Publication Date:
Research Org.:
BROOKHAVEN NATIONAL LABORATORY (BNL)
Sponsoring Org.:
USDOE SC OFFICE OF SCIENCE (SC)
OSTI Identifier:
1034717
Report Number(s):
BNL-96335-2011-JA
Journal ID: ISSN 0091-3286; OPEGAR; KA-04; TRN: US1200902
DOE Contract Number:  
DE-AC02-98CH10886
Resource Type:
Journal Article
Journal Name:
Optical Engineering
Additional Journal Information:
Journal Volume: 50; Journal Issue: 9; Journal ID: ISSN 0091-3286
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ALGORITHMS; ASYMMETRY; CALIBRATION; DATA PROCESSING; ELECTRON MICROSCOPES; INTERFEROMETERS; MICROSCOPES; MODULATION; SPECTRAL DENSITY; TRANSFER FUNCTIONS; WAVELENGTHS

Citation Formats

Yashchuk, V.V., Takacs, P., Anderson, E.H., Barber, S.K., Bouet, N., Cambie, R., Conley, R., McKinney, W.R., and Voronov, D.L. Calibration of the Modulation Transfer Function of Surface Profilometers with Binary Pseudorandom Test Standards: Expanding the Application Range to Fizeau Interferometers and Electron Microscopes. United States: N. p., 2011. Web. doi:10.1117/1.3622485.
Yashchuk, V.V., Takacs, P., Anderson, E.H., Barber, S.K., Bouet, N., Cambie, R., Conley, R., McKinney, W.R., & Voronov, D.L. Calibration of the Modulation Transfer Function of Surface Profilometers with Binary Pseudorandom Test Standards: Expanding the Application Range to Fizeau Interferometers and Electron Microscopes. United States. doi:10.1117/1.3622485.
Yashchuk, V.V., Takacs, P., Anderson, E.H., Barber, S.K., Bouet, N., Cambie, R., Conley, R., McKinney, W.R., and Voronov, D.L. Fri . "Calibration of the Modulation Transfer Function of Surface Profilometers with Binary Pseudorandom Test Standards: Expanding the Application Range to Fizeau Interferometers and Electron Microscopes". United States. doi:10.1117/1.3622485.
@article{osti_1034717,
title = {Calibration of the Modulation Transfer Function of Surface Profilometers with Binary Pseudorandom Test Standards: Expanding the Application Range to Fizeau Interferometers and Electron Microscopes},
author = {Yashchuk, V.V. and Takacs, P. and Anderson, E.H. and Barber, S.K. and Bouet, N. and Cambie, R. and Conley, R. and McKinney, W.R. and Voronov, D.L.},
abstractNote = {A modulation transfer function (MTF) calibration method based on binary pseudorandom (BPR) gratings and arrays has been proven to be an effective MTF calibration method for interferometric microscopes and a scatterometer. Here we report on a further expansion of the application range of the method. We describe the MTF calibration of a 6 in. phase shifting Fizeau interferometer. Beyond providing a direct measurement of the interferometer's MTF, tests with a BPR array surface have revealed an asymmetry in the instrument's data processing algorithm that fundamentally limits its bandwidth. Moreover, the tests have illustrated the effects of the instrument's detrending and filtering procedures on power spectral density measurements. The details of the development of a BPR test sample suitable for calibration of scanning and transmission electron microscopes are also presented. Such a test sample is realized as a multilayer structure with the layer thicknesses of two materials corresponding to the BPR sequence. The investigations confirm the universal character of the method that makes it applicable to a large variety of metrology instrumentation with spatial wavelength bandwidths from a few nanometers to hundreds of millimeters.},
doi = {10.1117/1.3622485},
journal = {Optical Engineering},
issn = {0091-3286},
number = 9,
volume = 50,
place = {United States},
year = {2011},
month = {9}
}