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Title: Large Area Microcorrals and Cavity Formation on Cantilevers using a Focused Ion Beam

Abstract

We utilize focused ion beam (FIB) to explore various sputtering parameters to form large area microcorrals and cavities on cantilevers. Microcorrals were rapidly created by modifying ion beam blur and overlaps. Modification in FIB sputtering parameters affects the periodicity and shape of corral microstructure. Cantilever deflections show ion beam amorphization effects as a function of sputtered area and cantilever base cavities with or without side walls. The FIB sputtering parameters address a method for rapid creation of a cantilever tensiometer with integrated fluid storage and delivery.

Authors:
;
Publication Date:
Research Org.:
Pacific Northwest National Laboratory (PNNL), Richland, WA (US), Environmental Molecular Sciences Laboratory (EMSL)
Sponsoring Org.:
USDOE
OSTI Identifier:
1032410
Report Number(s):
PNNL-SA-76520
20491a; KP1704020; TRN: US201202%%30
DOE Contract Number:  
AC05-76RL01830
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology B--Microelectronics and Nanometer Structures
Additional Journal Information:
Journal Volume: 29; Journal Issue: 5
Country of Publication:
United States
Language:
English
Subject:
54 ENVIRONMENTAL SCIENCES; CAVITIES; ION BEAMS; MICROSTRUCTURE; MODIFICATIONS; PERIODICITY; SHAPE; SPUTTERING; STORAGE; Modifying; FIB; Etching; Conditions; for; Applications; Microfluidics; Environmental Molecular Sciences Laboratory

Citation Formats

Saraf, Laxmikant V., and Britt, David W. Large Area Microcorrals and Cavity Formation on Cantilevers using a Focused Ion Beam. United States: N. p., 2011. Web. doi:10.1116/1.3626833.
Saraf, Laxmikant V., & Britt, David W. Large Area Microcorrals and Cavity Formation on Cantilevers using a Focused Ion Beam. United States. doi:10.1116/1.3626833.
Saraf, Laxmikant V., and Britt, David W. Wed . "Large Area Microcorrals and Cavity Formation on Cantilevers using a Focused Ion Beam". United States. doi:10.1116/1.3626833.
@article{osti_1032410,
title = {Large Area Microcorrals and Cavity Formation on Cantilevers using a Focused Ion Beam},
author = {Saraf, Laxmikant V. and Britt, David W.},
abstractNote = {We utilize focused ion beam (FIB) to explore various sputtering parameters to form large area microcorrals and cavities on cantilevers. Microcorrals were rapidly created by modifying ion beam blur and overlaps. Modification in FIB sputtering parameters affects the periodicity and shape of corral microstructure. Cantilever deflections show ion beam amorphization effects as a function of sputtered area and cantilever base cavities with or without side walls. The FIB sputtering parameters address a method for rapid creation of a cantilever tensiometer with integrated fluid storage and delivery.},
doi = {10.1116/1.3626833},
journal = {Journal of Vacuum Science and Technology B--Microelectronics and Nanometer Structures},
number = 5,
volume = 29,
place = {United States},
year = {2011},
month = {9}
}