Large Area Microcorrals and Cavity Formation on Cantilevers using a Focused Ion Beam

Journal Article · Wed Sep 14 00:00:00 EDT 2011 · Journal of Vacuum Science and Technology B--Microelectronics and Nanometer Structures

DOI:https://doi.org/10.1116/1.3626833· OSTI ID:1032410

Saraf, Laxmikant V; Britt, David W

We utilize focused ion beam (FIB) to explore various sputtering parameters to form large area microcorrals and cavities on cantilevers. Microcorrals were rapidly created by modifying ion beam blur and overlaps. Modification in FIB sputtering parameters affects the periodicity and shape of corral microstructure. Cantilever deflections show ion beam amorphization effects as a function of sputtered area and cantilever base cavities with or without side walls. The FIB sputtering parameters address a method for rapid creation of a cantilever tensiometer with integrated fluid storage and delivery.

• Research Organization: Pacific Northwest National Lab. (PNNL), Richland, WA (United States). Environmental Molecular Sciences Lab. (EMSL)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC05-76RL01830
• OSTI ID: 1032410
• Report Number(s): PNNL-SA-76520; 20491a; KP1704020; TRN: US201202%%30
• Journal Information: Journal of Vacuum Science and Technology B--Microelectronics and Nanometer Structures, Vol. 29, Issue 5
• Country of Publication: United States
• Language: English

Related Subjects

54 ENVIRONMENTAL SCIENCES
CAVITIES
ION BEAMS
MICROSTRUCTURE
MODIFICATIONS
PERIODICITY
SHAPE
SPUTTERING
STORAGE
Modifying
FIB
Etching
Conditions
for
Applications
Microfluidics
Environmental Molecular Sciences Laboratory