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Title: Sputter deposition of multilayer thermoelectric films: An approach to the fabrication of two-dimensional quantum wells

Abstract

The relative efficiency of a thermoelectric material is measured in terms of a dimensionless figure of merit, ZT. Though all known thermoelectric materials are believed to have ZT{le}1, recent theoretical results predict that thermoelectric devices fabricated as two-dimensional quantum wells (2D QWs) or onedimensional (1D) quantum wires could have ZT{ge}3. Multilayers with the dimensions of 2D QWs have been synthesized by alternately sputtering Bi{sub 0.9}Sb{sub 0.1} and PbTe{sub 0.8}Se{sub 0.2} onto a moving single-crystal sapphire substrate from dual magnetrons. These materials have been used to test the thermoelectric quantum-well concept and gain insight into relevant transport mechanisms. If successful, this research could lead to thermoelectric devices that have efficiencies close to that of an ideal Carnot engine. Ultimately, such devices could be used to replace conventional heat engines and mechanical refrigeration systems.

Authors:
; ; ; ;  [1]; ;  [2]
  1. Lawrence Livermore National Lab., CA (United States)
  2. Massachusetts Institute of Technology, Boston, MA (United States). Dept. of Physics
Publication Date:
Research Org.:
Lawrence Livermore National Lab., CA (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
10193231
Report Number(s):
UCRL-JC-117602; CONF-940830-2
ON: DE95002396
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Conference
Resource Relation:
Conference: 13. international conference on thermoelectrics,Kansas City, MO (United States),30 Aug - 1 Sep 1994; Other Information: PBD: Jul 1994
Country of Publication:
United States
Language:
English
Subject:
30 DIRECT ENERGY CONVERSION; 42 ENGINEERING; 36 MATERIALS SCIENCE; THERMOELECTRIC MATERIALS; THIN FILMS; HETEROJUNCTIONS; LAYERS; ANTIMONIDES; BISMUTH COMPOUNDS; LEAD TELLURIDES; LEAD SELENIDES; NESDPS Office of Nuclear Energy Space and Defense Power Systems; 300300; 426000; 360601; THERMOELECTRIC GENERATORS; COMPONENTS, ELECTRON DEVICES AND CIRCUITS; PREPARATION AND MANUFACTURE

Citation Formats

Farmer, J. C., Barbee, Jr., T. W., Chapline, Jr., G. C., Foreman, R. J., Summers, L. J., Dresselhaus, M. S., and Hicks, L. D. Sputter deposition of multilayer thermoelectric films: An approach to the fabrication of two-dimensional quantum wells. United States: N. p., 1994. Web.
Farmer, J. C., Barbee, Jr., T. W., Chapline, Jr., G. C., Foreman, R. J., Summers, L. J., Dresselhaus, M. S., & Hicks, L. D. Sputter deposition of multilayer thermoelectric films: An approach to the fabrication of two-dimensional quantum wells. United States.
Farmer, J. C., Barbee, Jr., T. W., Chapline, Jr., G. C., Foreman, R. J., Summers, L. J., Dresselhaus, M. S., and Hicks, L. D. Fri . "Sputter deposition of multilayer thermoelectric films: An approach to the fabrication of two-dimensional quantum wells". United States. https://www.osti.gov/servlets/purl/10193231.
@article{osti_10193231,
title = {Sputter deposition of multilayer thermoelectric films: An approach to the fabrication of two-dimensional quantum wells},
author = {Farmer, J. C. and Barbee, Jr., T. W. and Chapline, Jr., G. C. and Foreman, R. J. and Summers, L. J. and Dresselhaus, M. S. and Hicks, L. D.},
abstractNote = {The relative efficiency of a thermoelectric material is measured in terms of a dimensionless figure of merit, ZT. Though all known thermoelectric materials are believed to have ZT{le}1, recent theoretical results predict that thermoelectric devices fabricated as two-dimensional quantum wells (2D QWs) or onedimensional (1D) quantum wires could have ZT{ge}3. Multilayers with the dimensions of 2D QWs have been synthesized by alternately sputtering Bi{sub 0.9}Sb{sub 0.1} and PbTe{sub 0.8}Se{sub 0.2} onto a moving single-crystal sapphire substrate from dual magnetrons. These materials have been used to test the thermoelectric quantum-well concept and gain insight into relevant transport mechanisms. If successful, this research could lead to thermoelectric devices that have efficiencies close to that of an ideal Carnot engine. Ultimately, such devices could be used to replace conventional heat engines and mechanical refrigeration systems.},
doi = {},
url = {https://www.osti.gov/biblio/10193231}, journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {7}
}

Conference:
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