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Nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates

Patent ·
OSTI ID:1018206
 [1];  [2];  [3];  [3];  [3];  [3]
  1. Oak Ridge, TN
  2. Ithaca, NY
  3. Knoxville, TN
+ Show Author Affiliations

Methods, manufactures, machines and compositions are described for nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates. A method includes depositing a catalyst particle on a surface of a substrate to define a deterministically located position; growing an aligned elongated nanostructure on the substrate, an end of the aligned elongated nanostructure coupled to the substrate at the deterministically located position; coating the aligned elongated nanostructure with a conduit material; removing a portion of the conduit material to expose the catalyst particle; removing the catalyst particle; and removing the elongated nanostructure to define a nanoconduit.

Research Organization:
UT-Battelle, LLC (Oak Ridge, TN)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC05-00OR22725
Assignee:
UT-Battelle, LLC (Oak Ridge, TN)
Patent Number(s):
7,943,196
Application Number:
OSTI ID:
1018206
Country of Publication:
United States
Language:
English

References (19)

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journal January 2002

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