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Title: Practical spatial resolution of electron energy loss spectroscopy in aberration corrected scanning transmission elecron microscopy.

Abstract

The resolution of electron energy loss spectroscopy (EELS) is limited by delocalization of inelastic electron scattering rather than probe size in an aberration corrected scanning transmission electron microscope (STEM). In this study, we present an experimental quantification of EELS spatial resolution using chemically modulated 2 x (LaMnO{sub 3})/2 x (SrTiO{sub 3}) and 2 x (SrVO{sub 3})/2 x (SrTiO{sub 3}) superlattices by measuring the full width at half maxima (FWHM) of integrated Ti M{sub 2,3}, Ti L{sub 2,3}, V L{sub 2,3}, Mn L{sub 2,3}, La N{sub 4,5}, La N{sub 2,3} La M{sub 4,5} and Sr L{sub 3} edges over the superlattices. The EELS signals recorded using large collection angles are peaked at atomic columns. The FWHM of the EELS profile, obtained by curve-fitting, reveals a systematic trend with the energy loss for the Ti, V, and Mn edges. However, the experimental FWHM of the Sr and La edges deviates significantly from the observed experimental tendency. Spatial resolution of aberration corrected STEM/EELS measured for Ti M{sub 2,3}, Ti L{sub 2,3}, V L{sub 2,3}, Mn L{sub 2,3}, La N{sub 4,5}, La N{sub 2,3} La M{sub 4,5} and Sr L{sub 3} edges using oxide superlattices. EELS signals recorded using large collection angles are peakedmore » at atomic columns. The FWHM of the EELS profiles agrees with Egerton's empirical delocalization model for Ti, V, and Mn edges in thin samples. The FWHM of the Sr and La edges is larger than the model's prediction because of scattering by heavy atomic columns.« less

Authors:
; ; ; ;  [1]
  1. Center for Nanoscale Materials
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1018192
Report Number(s):
ANL/MSD/JA-69656
Journal ID: 0968-4328; TRN: US201113%%660
DOE Contract Number:  
DE-AC02-06CH11357
Resource Type:
Journal Article
Journal Name:
Micron
Additional Journal Information:
Journal Volume: 42; Journal Issue: 6 ; Aug. 2011
Country of Publication:
United States
Language:
ENGLISH
Subject:
99 GENERAL AND MISCELLANEOUS//MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE; ELECTRON MICROSCOPES; ELECTRONS; ENERGY-LOSS SPECTROSCOPY; FORECASTING; OXIDES; PROBES; RESOLUTION; SCATTERING; SPATIAL RESOLUTION; SUPERLATTICES; TRANSMISSION ELECTRON MICROSCOPY

Citation Formats

Shah, A B, Ramasse, Q M, Wen, J G, Bhattacharya, A, Zuo, J M, MSD), Univ. of Illinois), and LBNL). Practical spatial resolution of electron energy loss spectroscopy in aberration corrected scanning transmission elecron microscopy.. United States: N. p., 2011. Web. doi:10.1016/j.micron.2010.12.008.
Shah, A B, Ramasse, Q M, Wen, J G, Bhattacharya, A, Zuo, J M, MSD), Univ. of Illinois), & LBNL). Practical spatial resolution of electron energy loss spectroscopy in aberration corrected scanning transmission elecron microscopy.. United States. doi:10.1016/j.micron.2010.12.008.
Shah, A B, Ramasse, Q M, Wen, J G, Bhattacharya, A, Zuo, J M, MSD), Univ. of Illinois), and LBNL). Mon . "Practical spatial resolution of electron energy loss spectroscopy in aberration corrected scanning transmission elecron microscopy.". United States. doi:10.1016/j.micron.2010.12.008.
@article{osti_1018192,
title = {Practical spatial resolution of electron energy loss spectroscopy in aberration corrected scanning transmission elecron microscopy.},
author = {Shah, A B and Ramasse, Q M and Wen, J G and Bhattacharya, A and Zuo, J M and MSD) and Univ. of Illinois) and LBNL)},
abstractNote = {The resolution of electron energy loss spectroscopy (EELS) is limited by delocalization of inelastic electron scattering rather than probe size in an aberration corrected scanning transmission electron microscope (STEM). In this study, we present an experimental quantification of EELS spatial resolution using chemically modulated 2 x (LaMnO{sub 3})/2 x (SrTiO{sub 3}) and 2 x (SrVO{sub 3})/2 x (SrTiO{sub 3}) superlattices by measuring the full width at half maxima (FWHM) of integrated Ti M{sub 2,3}, Ti L{sub 2,3}, V L{sub 2,3}, Mn L{sub 2,3}, La N{sub 4,5}, La N{sub 2,3} La M{sub 4,5} and Sr L{sub 3} edges over the superlattices. The EELS signals recorded using large collection angles are peaked at atomic columns. The FWHM of the EELS profile, obtained by curve-fitting, reveals a systematic trend with the energy loss for the Ti, V, and Mn edges. However, the experimental FWHM of the Sr and La edges deviates significantly from the observed experimental tendency. Spatial resolution of aberration corrected STEM/EELS measured for Ti M{sub 2,3}, Ti L{sub 2,3}, V L{sub 2,3}, Mn L{sub 2,3}, La N{sub 4,5}, La N{sub 2,3} La M{sub 4,5} and Sr L{sub 3} edges using oxide superlattices. EELS signals recorded using large collection angles are peaked at atomic columns. The FWHM of the EELS profiles agrees with Egerton's empirical delocalization model for Ti, V, and Mn edges in thin samples. The FWHM of the Sr and La edges is larger than the model's prediction because of scattering by heavy atomic columns.},
doi = {10.1016/j.micron.2010.12.008},
journal = {Micron},
number = 6 ; Aug. 2011,
volume = 42,
place = {United States},
year = {2011},
month = {8}
}