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Title: Filtered cathodic arc source

Abstract

Disclosed is a continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45{degrees} to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles.

Inventors:
;
Publication Date:
Research Org.:
Lawrence Livermore National Lab., CA (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
10172067
Patent Number(s):
PATENTS-US-A7921780
Application Number:
ON: DE94016128; PAN: 7-921,780
Assignee:
Dept. of Energy LLNL; SCA: 661220; PA: EDB-94:126399; NTS-94:023508; ERA-19:028583; SN: 94001058817
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent Application
Resource Relation:
Other Information: PBD: 1992
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ION SOURCES; DESIGN; ELECTRIC ARCS; MAGNETIC FIELDS; FILTERS; SOLENOIDS; 661220; PARTICLE BEAM PRODUCTION AND HANDLING; TARGETS

Citation Formats

Falabella, S., and Sanders, D.M. Filtered cathodic arc source. United States: N. p., 1992. Web.
Falabella, S., & Sanders, D.M. Filtered cathodic arc source. United States.
Falabella, S., and Sanders, D.M. Thu . "Filtered cathodic arc source". United States. doi:. https://www.osti.gov/servlets/purl/10172067.
@article{osti_10172067,
title = {Filtered cathodic arc source},
author = {Falabella, S. and Sanders, D.M.},
abstractNote = {Disclosed is a continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45{degrees} to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Dec 31 00:00:00 EST 1992},
month = {Thu Dec 31 00:00:00 EST 1992}
}

Patent Application:

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