An ion source based on the cathodic arc
Abstract
This invention is comprised of a cylindrically symmetric arc source to produce a ring of ions which leave the surface of the arc target radially and are reflected by electrostatic fields present in the source to a point of use, such as a part to be coated. An array of electrically isolated rings positioned in the source serves the duel purpose of minimizing bouncing of macroparticles and providing electrical insulation to maximize the electric field gradients within the source. The source also includes a series of baffles which function as a filtering or trapping mechanism for any macroparticles.
- Inventors:
- Publication Date:
- Research Org.:
- Lawrence Livermore National Lab., CA (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 10171303
- Patent Number(s):
- PATENTS-US-A7921779
- Application Number:
- ON: DE94016129; PAN: 7-921,779
- Assignee:
- Dept. of Energy
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent Application
- Resource Relation:
- Other Information: PBD: 1992
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ION SOURCES; DESIGN; SPRAY COATING; INVENTIONS; CONFIGURATION; SYMMETRY; 360101; 661220; PREPARATION AND FABRICATION; PARTICLE BEAM PRODUCTION AND HANDLING; TARGETS
Citation Formats
Sanders, D M, and Falabella, S. An ion source based on the cathodic arc. United States: N. p., 1992.
Web.
Sanders, D M, & Falabella, S. An ion source based on the cathodic arc. United States.
Sanders, D M, and Falabella, S. 1992.
"An ion source based on the cathodic arc". United States. https://www.osti.gov/servlets/purl/10171303.
@article{osti_10171303,
title = {An ion source based on the cathodic arc},
author = {Sanders, D M and Falabella, S},
abstractNote = {This invention is comprised of a cylindrically symmetric arc source to produce a ring of ions which leave the surface of the arc target radially and are reflected by electrostatic fields present in the source to a point of use, such as a part to be coated. An array of electrically isolated rings positioned in the source serves the duel purpose of minimizing bouncing of macroparticles and providing electrical insulation to maximize the electric field gradients within the source. The source also includes a series of baffles which function as a filtering or trapping mechanism for any macroparticles.},
doi = {},
url = {https://www.osti.gov/biblio/10171303},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Dec 31 00:00:00 EST 1992},
month = {Thu Dec 31 00:00:00 EST 1992}
}
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