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Title: An ion source based on the cathodic arc

Abstract

This invention is comprised of a cylindrically symmetric arc source to produce a ring of ions which leave the surface of the arc target radially and are reflected by electrostatic fields present in the source to a point of use, such as a part to be coated. An array of electrically isolated rings positioned in the source serves the duel purpose of minimizing bouncing of macroparticles and providing electrical insulation to maximize the electric field gradients within the source. The source also includes a series of baffles which function as a filtering or trapping mechanism for any macroparticles.

Inventors:
;
Publication Date:
Research Org.:
Lawrence Livermore National Lab., CA (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
10171303
Patent Number(s):
PATENTS-US-A7921779
Application Number:
ON: DE94016129; PAN: 7-921,779
Assignee:
Dept. of Energy LLNL; SCA: 360101; 661220; PA: EDB-94:125022; NTS-94:023856; ERA-19:030533; SN: 94001058818
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent Application
Resource Relation:
Other Information: PBD: 1992
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ION SOURCES; DESIGN; SPRAY COATING; INVENTIONS; CONFIGURATION; SYMMETRY; 360101; 661220; PREPARATION AND FABRICATION; PARTICLE BEAM PRODUCTION AND HANDLING; TARGETS

Citation Formats

Sanders, D.M., and Falabella, S. An ion source based on the cathodic arc. United States: N. p., 1992. Web.
Sanders, D.M., & Falabella, S. An ion source based on the cathodic arc. United States.
Sanders, D.M., and Falabella, S. Thu . "An ion source based on the cathodic arc". United States. doi:. https://www.osti.gov/servlets/purl/10171303.
@article{osti_10171303,
title = {An ion source based on the cathodic arc},
author = {Sanders, D.M. and Falabella, S.},
abstractNote = {This invention is comprised of a cylindrically symmetric arc source to produce a ring of ions which leave the surface of the arc target radially and are reflected by electrostatic fields present in the source to a point of use, such as a part to be coated. An array of electrically isolated rings positioned in the source serves the duel purpose of minimizing bouncing of macroparticles and providing electrical insulation to maximize the electric field gradients within the source. The source also includes a series of baffles which function as a filtering or trapping mechanism for any macroparticles.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Dec 31 00:00:00 EST 1992},
month = {Thu Dec 31 00:00:00 EST 1992}
}

Patent Application:

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