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Title: Microcantilever heater-thermometer with integrated temperature-compensated strain sensor

Abstract

The present invention provides microcantilever hotplate devices which incorporate temperature compensating strain sensors. The microcantilever hotplate devices of the present invention comprise microcantilevers having temperature compensating strain sensors and resistive heaters. The present invention also provides methods for using a microcantilever hotplate for temperature compensated surface stress measurements, chemical/biochemical sensing, measuring various properties of compounds adhered to the microcantilever hotplate surface, or for temperature compensated deflection measurements.

Inventors:
 [1];  [1];  [2]
  1. Champaign, IL
  2. Wolfsburg, DE
Publication Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USODE
OSTI Identifier:
1016696
Patent Number(s):
7,928,343
Application Number:
US Patent Application 11/950,029
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

King, William P, Lee, Jungchul, and Goericke, Fabian T. Microcantilever heater-thermometer with integrated temperature-compensated strain sensor. United States: N. p., 2011. Web.
King, William P, Lee, Jungchul, & Goericke, Fabian T. Microcantilever heater-thermometer with integrated temperature-compensated strain sensor. United States.
King, William P, Lee, Jungchul, and Goericke, Fabian T. Tue . "Microcantilever heater-thermometer with integrated temperature-compensated strain sensor". United States. https://www.osti.gov/servlets/purl/1016696.
@article{osti_1016696,
title = {Microcantilever heater-thermometer with integrated temperature-compensated strain sensor},
author = {King, William P and Lee, Jungchul and Goericke, Fabian T},
abstractNote = {The present invention provides microcantilever hotplate devices which incorporate temperature compensating strain sensors. The microcantilever hotplate devices of the present invention comprise microcantilevers having temperature compensating strain sensors and resistive heaters. The present invention also provides methods for using a microcantilever hotplate for temperature compensated surface stress measurements, chemical/biochemical sensing, measuring various properties of compounds adhered to the microcantilever hotplate surface, or for temperature compensated deflection measurements.},
doi = {},
url = {https://www.osti.gov/biblio/1016696}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2011},
month = {4}
}

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