Microcantilever heater-thermometer with integrated temperature-compensated strain sensor
Abstract
The present invention provides microcantilever hotplate devices which incorporate temperature compensating strain sensors. The microcantilever hotplate devices of the present invention comprise microcantilevers having temperature compensating strain sensors and resistive heaters. The present invention also provides methods for using a microcantilever hotplate for temperature compensated surface stress measurements, chemical/biochemical sensing, measuring various properties of compounds adhered to the microcantilever hotplate surface, or for temperature compensated deflection measurements.
- Inventors:
-
- Champaign, IL
- Wolfsburg, DE
- Publication Date:
- Research Org.:
- Univ. of Illinois at Urbana-Champaign, IL (United States)
- Sponsoring Org.:
- USODE
- OSTI Identifier:
- 1016696
- Patent Number(s):
- 7,928,343
- Application Number:
- US Patent Application 11/950,029
- Assignee:
- The Board of Trustees of the University of Illinois (Urbana, IL)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
King, William P, Lee, Jungchul, and Goericke, Fabian T. Microcantilever heater-thermometer with integrated temperature-compensated strain sensor. United States: N. p., 2011.
Web.
King, William P, Lee, Jungchul, & Goericke, Fabian T. Microcantilever heater-thermometer with integrated temperature-compensated strain sensor. United States.
King, William P, Lee, Jungchul, and Goericke, Fabian T. Tue .
"Microcantilever heater-thermometer with integrated temperature-compensated strain sensor". United States. https://www.osti.gov/servlets/purl/1016696.
@article{osti_1016696,
title = {Microcantilever heater-thermometer with integrated temperature-compensated strain sensor},
author = {King, William P and Lee, Jungchul and Goericke, Fabian T},
abstractNote = {The present invention provides microcantilever hotplate devices which incorporate temperature compensating strain sensors. The microcantilever hotplate devices of the present invention comprise microcantilevers having temperature compensating strain sensors and resistive heaters. The present invention also provides methods for using a microcantilever hotplate for temperature compensated surface stress measurements, chemical/biochemical sensing, measuring various properties of compounds adhered to the microcantilever hotplate surface, or for temperature compensated deflection measurements.},
doi = {},
url = {https://www.osti.gov/biblio/1016696},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2011},
month = {4}
}
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