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Title: Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray light

Patent ·
OSTI ID:1016677
 [1];  [1];  [2];  [3];  [4];  [4];  [5]
  1. Fort Collins, CO
  2. San Diego, CA
  3. Encinitas, CA
  4. El Cerrito, CA
  5. Stockholm, SE
+ Show Author Affiliations

Ablation of holes having diameters as small as 82 nm and having clean walls was obtained in a poly(methyl methacrylate) on a silicon substrate by focusing pulses from a Ne-like Ar, 46.9 nm wavelength, capillary-discharge laser using a freestanding Fresnel zone plate diffracting into third order is described. Spectroscopic analysis of light from the ablation has also been performed. These results demonstrate the use of focused coherent EUV/SXR light for the direct nanoscale patterning of materials.

Research Organization:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-05CH11231
Assignee:
Colorado State University Research Foundation (Fort Collins, CO); The Regents of University of California (Oakland, CA); JMAR Technologies, Inc. (San Diego, CA)
Patent Number(s):
7,931,850
Application Number:
US Patent Application 12/861,627
OSTI ID:
1016677
Country of Publication:
United States
Language:
English

References (7)

Achievement of essentially full spatial coherence in a high-average-power soft-x-ray laser journal February 2001
X-ray nanoplasma instruments and tools conference May 2005
Nanometer focusing of hard x rays by phase zone plates journal May 1999
Ablation of PMMA, PTFE, and Si by soft x-rays emitted from hot dense plasma conference September 2002
Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9 nm and gain down to 10.9 nm journal November 2005
Applications of high-repetition-rate tabletop soft x-ray laser: laser ablation with a focused beam and reflectometry of materials
  • Benware, Brady R.; Rocca, Jorge J. G.; Ozols, A.
  • SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, SPIE Proceedings https://doi.org/10.1117/12.366670
conference October 1999
Continuous high-repetition-rate operation of collisional soft-x-ray lasers with solid targets journal January 2006

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