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Title: Detection of subsurface defects in machined silicon nitride ceramics by optical scattering methods

Conference ·
OSTI ID:10166524

Si{sub 3}N{sub 4} materials, from two manufacturers in the form of texture test bars, were studied by optical Fourier scattering methods. Subsurface defects were synthesized by either ultrasonically drilling or by grinding slots parallel to the surface. Because of unique optical transmission properties of ceramics subsurface defects, such as those likely to be caused by machining may be detected. S-polarized He-Ne laser light ({lambda} = 0.6328 {mu}m) was used as the light source. Specular reflections were detected by an optical Fourier method which incorporated cross-polarization. Analysis of scattered laser light was accomplished using a CCD-array camera, an 8-bit A/D converter, and a PC with locally written software. Results show that subsurface defects can be detected and that for the surface finishes studied, changes in signal-to-noise (S/N) are observable.

Research Organization:
Argonne National Lab., IL (United States)
Sponsoring Organization:
Department of Defense, Washington, DC (United States)
DOE Contract Number:
W-31109-ENG-38
OSTI ID:
10166524
Report Number(s):
ANL/MCT/CP-79253; CONF-930793-1; ON: DE93015554
Resource Relation:
Conference: International conference on machining of advanced materials,Gaithersburg, MD (United States),20-22 Jul 1993; Other Information: PBD: [1993]
Country of Publication:
United States
Language:
English