skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Totem pole drive decks for the high-voltage, pulsed-power modulator for a large-scale plasma source ion implantation system

Abstract

Plasma source ion implantation (PSII) is an industrially-relevant technique to change the surface composition of materials, thereby improving the mechanical, chemical, electrical, or optical properties. Pre-manufactured parts are immersed in a plasma and are pulsed with a high voltage source that accelerates the ions to the surface, where they become implanted, modifying the surface characteristics. The high voltage applied to the ``workpiece`` is supplied by a high-voltage, pulsed-power modulator capable of operating to 120 kV, with an output pulse width to 20 uS at a repetition rate of up to 2 kHz. Output currents of up to 60 A, and average powers of 225 kW (6.6 MW peak) will be the ultimate capability. Initial system start-up will be limited by a 60 kV, 1 A charging power supply. This paper describes the totem pole drive decks, the ``on`` deck and ``off`` deck, used as a pre-driver to the main high voltage switch tubes which applies power to the workpiece. The pulse length and frequency are externally controlled and then fiber-optically coupled to the modulator totem pole drive decks. The circuitry of the planar triode drivers will be presented in addition to experimental results.

Authors:
;
Publication Date:
Research Org.:
Los Alamos National Lab., NM (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
10165837
Report Number(s):
LA-UR-93-2299; CONF-930616-8
ON: DE93016468
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Conference
Resource Relation:
Conference: 9. IEEE pulsed power conference,Albuquerque, NM (United States),21-23 Jun 1993; Other Information: PBD: [1993]
Country of Publication:
United States
Language:
English
Subject:
07 ISOTOPES AND RADIATION SOURCES; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ION SOURCES; MODULATION; IRRADIATION PLANTS; ION IMPLANTATION; ELECTRONIC CIRCUITS; 070205; 665300; INDUSTRIAL APPLICATIONS, RADIATION PROCESSING; INTERACTIONS BETWEEN BEAMS AND CONDENSED MATTER

Citation Formats

Gribble, R J, and Reass, W A. Totem pole drive decks for the high-voltage, pulsed-power modulator for a large-scale plasma source ion implantation system. United States: N. p., 1993. Web.
Gribble, R J, & Reass, W A. Totem pole drive decks for the high-voltage, pulsed-power modulator for a large-scale plasma source ion implantation system. United States.
Gribble, R J, and Reass, W A. Thu . "Totem pole drive decks for the high-voltage, pulsed-power modulator for a large-scale plasma source ion implantation system". United States. https://www.osti.gov/servlets/purl/10165837.
@article{osti_10165837,
title = {Totem pole drive decks for the high-voltage, pulsed-power modulator for a large-scale plasma source ion implantation system},
author = {Gribble, R J and Reass, W A},
abstractNote = {Plasma source ion implantation (PSII) is an industrially-relevant technique to change the surface composition of materials, thereby improving the mechanical, chemical, electrical, or optical properties. Pre-manufactured parts are immersed in a plasma and are pulsed with a high voltage source that accelerates the ions to the surface, where they become implanted, modifying the surface characteristics. The high voltage applied to the ``workpiece`` is supplied by a high-voltage, pulsed-power modulator capable of operating to 120 kV, with an output pulse width to 20 uS at a repetition rate of up to 2 kHz. Output currents of up to 60 A, and average powers of 225 kW (6.6 MW peak) will be the ultimate capability. Initial system start-up will be limited by a 60 kV, 1 A charging power supply. This paper describes the totem pole drive decks, the ``on`` deck and ``off`` deck, used as a pre-driver to the main high voltage switch tubes which applies power to the workpiece. The pulse length and frequency are externally controlled and then fiber-optically coupled to the modulator totem pole drive decks. The circuitry of the planar triode drivers will be presented in addition to experimental results.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1993},
month = {7}
}

Conference:
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

Save / Share: