System design and operation of a 100 kilovolt, 2 kilohertz pulse modulator for plasma source ion implantation
This paper describes the electrical design and operation of a high power modulator system implemented for the Los Alamos Plasma Source Ion Implantation (PSII) facility. To test the viability of the PSII process for various automotive components, the modulator must accept wide variations of load impedance. Components have varying area and composition which must be processed with different plasmas. Additionally, the load impedance may change by large factors during the typical 20 uS pulse, due to plasma displacement currents and sheath growth. As a preliminary design to test the system viability for automotive component implantation, suitable for a manufacturing environment, circuit topology must be able to directly scale to high power versions, for increased component through-put. We have chosen an evolutionary design approach with component families of characterized performance, which should Ion result in a reliable modulator system with component lifetimes. The modulator utilizes a pair of Litton L-3408 hollow beam amplifier tubes as switching elements in a ``hot-deck`` configuration. Internal to the main of planar triode hot deck, an additional pair decks, configured in a totem pole circuit, provide input drive to the L-3408 mod-anodes. The modulator can output over 2 amps average current (at 100 kV) with 1 kW of modanode drive. Diagnostic electronics monitor the load and stops pulses for 100 mS when a load arcs occur. This paper, in addition to providing detailed engineering design information, will provide operational characteristics and reliability data that direct the design to the higher power, mass production line capable modulators.
- Research Organization:
- Los Alamos National Lab., NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-36
- OSTI ID:
- 10162504
- Report Number(s):
- LA-UR-94-2193; CONF-940678-1; ON: DE94014424
- Resource Relation:
- Conference: 21. international power modulator symposium,Costa Mesa, CA (United States),28-30 Jun 1994; Other Information: PBD: [1994]
- Country of Publication:
- United States
- Language:
- English
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