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Title: Aluminum nitride transitional layer for reducing dislocation density and cracking of AIGan epitaxial films

Patent ·
OSTI ID:1015463

A denticulated Group III nitride structure that is useful for growing Al.sub.xGa.sub.1-xN to greater thicknesses without cracking and with a greatly reduced threading dislocation (TD) density.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
7,915,626
Application Number:
US Patent Application 11/504,885
OSTI ID:
1015463
Country of Publication:
United States
Language:
English

References (2)

Metalorganic Vapor Phase Epitaxy Growth and Study of Stress in AlGaN Using Epitaxial AlN as Underlying Layer journal June 2003
Air-bridged lateral growth of an Al0.98Ga0.02N layer by introduction of porosity in an AlN buffer journal October 2005