A Plasma Lens for Magnetron Sputtering
Journal Article
·
· IEEE Transactions on Plasma Science
OSTI ID:1015327
A plasma lens, consisting of a solenoid and potential-defining ring electrodes, has been placed between a magnetron and substrates to be coated. Photography reveals qualitative information on excitation, ionization, and the transport of plasma to the substrate.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- Accelerator& Fusion Research Division; Environmental Energy Technologies Division
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 1015327
- Report Number(s):
- LBNL-4156E; ITPSBD; TRN: US1102820
- Journal Information:
- IEEE Transactions on Plasma Science, Journal Name: IEEE Transactions on Plasma Science; ISSN 0093-3813
- Country of Publication:
- United States
- Language:
- English
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