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Title: A Plasma Lens for Magnetron Sputtering

Abstract

A plasma lens, consisting of a solenoid and potential-defining ring electrodes, has been placed between a magnetron and substrates to be coated. Photography reveals qualitative information on excitation, ionization, and the transport of plasma to the substrate.

Authors:
;
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
Accelerator& Fusion Research Division; Environmental Energy Technologies Division
OSTI Identifier:
1015327
Report Number(s):
LBNL-4156E
Journal ID: ISSN 0093-3813; ITPSBD; TRN: US1102820
DOE Contract Number:  
DE-AC02-05CH11231
Resource Type:
Journal Article
Journal Name:
IEEE Transactions on Plasma Science
Additional Journal Information:
Journal Name: IEEE Transactions on Plasma Science; Journal ID: ISSN 0093-3813
Country of Publication:
United States
Language:
English
Subject:
36; 70; ELECTRODES; ELECTROMAGNETIC LENSES; EXCITATION; IONIZATION; MAGNETRONS; PHOTOGRAPHY; PLASMA; SOLENOIDS; SPUTTERING; SUBSTRATES; TRANSPORT; plasma lens, magentron sputtering, magnetic field, plasma transport

Citation Formats

Anders, Andre, and Brown, Jeff. A Plasma Lens for Magnetron Sputtering. United States: N. p., 2010. Web.
Anders, Andre, & Brown, Jeff. A Plasma Lens for Magnetron Sputtering. United States.
Anders, Andre, and Brown, Jeff. Tue . "A Plasma Lens for Magnetron Sputtering". United States. https://www.osti.gov/servlets/purl/1015327.
@article{osti_1015327,
title = {A Plasma Lens for Magnetron Sputtering},
author = {Anders, Andre and Brown, Jeff},
abstractNote = {A plasma lens, consisting of a solenoid and potential-defining ring electrodes, has been placed between a magnetron and substrates to be coated. Photography reveals qualitative information on excitation, ionization, and the transport of plasma to the substrate.},
doi = {},
journal = {IEEE Transactions on Plasma Science},
issn = {0093-3813},
number = ,
volume = ,
place = {United States},
year = {2010},
month = {11}
}