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Title: Advanced laser driver for soft x-ray projection lithography

Abstract

A diode-pumped Nd:YAG laser for use as a driver for a soft x-ray projection lithography system is described. The laser will output 0.5 to 1 J per pulse with about 5 ns pulse width at up to 1.5 kHz repetition frequency. The design employs microchannel-cooled diode laser arrays for optical pumping, zigzag slab energy storage, and a single frequency oscillator injected regenerative amplifier cavity using phase conjugator beam correction for near diffraction limited beam quality. The design and initial results of this laser`s activation experiments will be presented.

Authors:
; ; ; ; ;
Publication Date:
Research Org.:
Lawrence Livermore National Lab., CA (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
10150132
Report Number(s):
UCRL-JC-117000; CONF-9404135-2
ON: DE94011643; TRN: AHC29411%%72
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Technical Report
Resource Relation:
Conference: 5. international symposium on high power lasers and applications,Vienna (Austria),5-8 Apr 1994; Other Information: PBD: Mar 1994
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; NEODYMIUM LASERS; PERFORMANCE; DESIGN; OPTICAL PUMPING; SEMICONDUCTOR LASERS; LASER CAVITIES; OSCILLATORS; EXPERIMENTAL DATA; 426002; LASERS AND MASERS

Citation Formats

Zapata, L.E., Beach, R.J., Dane, C.B., Reichert, P., Honig, J.N., and Hackel, L.A. Advanced laser driver for soft x-ray projection lithography. United States: N. p., 1994. Web. doi:10.2172/10150132.
Zapata, L.E., Beach, R.J., Dane, C.B., Reichert, P., Honig, J.N., & Hackel, L.A. Advanced laser driver for soft x-ray projection lithography. United States. doi:10.2172/10150132.
Zapata, L.E., Beach, R.J., Dane, C.B., Reichert, P., Honig, J.N., and Hackel, L.A. Tue . "Advanced laser driver for soft x-ray projection lithography". United States. doi:10.2172/10150132. https://www.osti.gov/servlets/purl/10150132.
@article{osti_10150132,
title = {Advanced laser driver for soft x-ray projection lithography},
author = {Zapata, L.E. and Beach, R.J. and Dane, C.B. and Reichert, P. and Honig, J.N. and Hackel, L.A.},
abstractNote = {A diode-pumped Nd:YAG laser for use as a driver for a soft x-ray projection lithography system is described. The laser will output 0.5 to 1 J per pulse with about 5 ns pulse width at up to 1.5 kHz repetition frequency. The design employs microchannel-cooled diode laser arrays for optical pumping, zigzag slab energy storage, and a single frequency oscillator injected regenerative amplifier cavity using phase conjugator beam correction for near diffraction limited beam quality. The design and initial results of this laser`s activation experiments will be presented.},
doi = {10.2172/10150132},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {3}
}