Manufacture of silicon-based devices having disordered sulfur-doped surface layers

Mazur, Eric

Manufacture of silicon-based devices having disordered sulfur-doped surface layers

Patent · 08 April 2008

OSTI ID:1014531

Mazur, Eric ^[1]

Concord, MA

The present invention provides methods of fabricating a radiation-absorbing semiconductor wafer by irradiating at least one surface location of a silicon substrate, e.g., an n-doped crystalline silicon, by a plurality of temporally short laser pulses, e.g., femtosecond pulses, while exposing that location to a substance, e.g., SF.sub.6, having an electron-donating constituent so as to generate a substantially disordered surface layer (i.e., a microstructured layer) that incorporates a concentration of that electron-donating constituent, e.g., sulfur. The substrate is also annealed at an elevated temperature and for a duration selected to enhance the charge carrier density in the surface layer. For example, the substrate can be annealed at a temperature in a range of about 700 K to about 900 K.

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Research Organization:: President and Fellows of Harvard College (Cambridge, MA)

Sponsoring Organization:: USDOE

DOE Contract Number:: FC36-01GO11051

Assignee:: President and Fellows of Harvard College (Cambridge, MA)

Patent Number(s):: 7,354,792

Application Number:: 10/950,248

OSTI ID:: 1014531

Country of Publication:: United States

Language:: English

References (19)

Femtosecond laser-induced formation of spikes on silicon Her, T. -H.; Finlay, R. J.; Wu, C. Applied Physics A: Materials Science & Processing, Vol. 70, Issue 4 https://doi.org/10.1007/s003390051052	journal	April 2000
Surface nanostructuring of silicon Pedraza, A. J.; Fowlkes, J. D.; Guan, Y. -F. Applied Physics A, Vol. 77, Issue 2 https://doi.org/10.1007/s00339-003-2113-9	journal	July 2003
Femtosecond laser-assisted microstructuring of silicon for novel detector, sensing and display technologies Carey, J. E.; Mazur, E. 2003 IEEE LEOS Annual Meeting Conference Proceedings, The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, 2003. LEOS 2003. https://doi.org/10.1109/LEOS.2003.1252883	conference	January 2003
Near-unity below-band-gap absorption by microstructured silicon Wu, C.; Crouch, C. H.; Zhao, L. Applied Physics Letters, Vol. 78, Issue 13, p. 1850-1852 https://doi.org/10.1063/1.1358846	journal	March 2001
Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses Younkin, R.; Carey, J. E.; Mazur, E. Journal of Applied Physics, Vol. 93, Issue 5, p. 2626-2629 https://doi.org/10.1063/1.1545159	journal	March 2003
Whiskerlike structure growth on silicon exposed to ArF excimer laser irradiation Sánchez, F.; Morenza, J. L.; Aguiar, R. Applied Physics Letters, Vol. 69, Issue 5, p. 620-622 https://doi.org/10.1063/1.117926	journal	July 1996
Surface microstructuring and long-range ordering of silicon nanoparticles Fowlkes, J. D.; Pedraza, A. J.; Blom, D. A. Applied Physics Letters, Vol. 80, Issue 20, p. 3799-3801 https://doi.org/10.1063/1.1480106	journal	May 2002
Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses Younkin, R.; Mazur, E.; Carey, J. E. CLEO 2001. Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Postconference Technical Digest, Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Postconference Technical Digest (IEEE Cat. No.01CH37170) https://doi.org/10.1109/CLEO.2001.948160	conference	January 2001
Formation of conical microstructures upon laser evaporation of solids Dolgaev, S. I.; Lavrishev, S. V.; Lyalin, A. A. Applied Physics A Materials Science & Processing, Vol. 73, Issue 2 https://doi.org/10.1007/s003390100530	journal	August 2001
Femtosecond-Laser-Assisted Microstructuring of Silicon Surfaces Carey, James E.; Crouch, Catherine H.; Mazur, Eric Optics and Photonics News, Vol. 14, Issue 2 https://doi.org/10.1364/OPN.14.2.000032	journal	January 2003
Infrared absorption by sulfur-doped silicon formed by femtosecond laser irradiation Crouch, C. H.; Carey, J. E.; Shen, M. Applied Physics A, Vol. 79, Issue 7 https://doi.org/10.1007/s00339-004-2676-0	journal	November 2004
Formation of regular arrays of silicon microspikes by femtosecond laser irradiation through a mask Shen, M. Y.; Crouch, C. H.; Carey, J. E. Applied Physics Letters, Vol. 82, Issue 11, p. 1715-1717 https://doi.org/10.1063/1.1561162	journal	March 2003
Novel conical microstructures created in silicon with femtosecond laser pulses No authors listed Technical Digest Summaries of papers presented at the Conference on Lasers and Electro-Optics Conference Edition. 1998 Technical Digest Series, Vol.6, Technical Digest. Summaries of Papers Presented at the Conference on Lasers and Electro-Optics. Conference Edition. 1998 Technical Digest Series, Vol.6 (IEEE Cat. No.98CH36178) https://doi.org/10.1109/CLEO.1998.676564	conference	January 1998
Field emission from silicon microstructures formed by femtosecond laser assisted etching Carey, J. E.; Zhao, L.; Wu, C. CLEO 2001. Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Postconference Technical Digest, Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Postconference Technical Digest (IEEE Cat. No.01CH37170) https://doi.org/10.1109/CLEO.2001.948159	conference	January 2001
Comparison of structure and properties of femtosecond and nanosecond laser-structured silicon Crouch, C. H.; Carey, J. E.; Warrender, J. M. Applied Physics Letters, Vol. 84, Issue 11, p. 1850-1852 https://doi.org/10.1063/1.1667004	journal	March 2004
Dynamics of the hydrodynamical growth of columns on silicon exposed to ArF excimer-laser irradiation Sánchez, F.; Morenza, J. L.; Aguiar, R. Applied Physics A: Materials Science & Processing, Vol. 66, Issue 1 https://doi.org/10.1007/s003390050641	journal	January 1998
Microstructuring of silicon with femtosecond laser pulses Her, Tsing-Hua; Finlay, Richard J.; Wu, Claudia Applied Physics Letters, Vol. 73, Issue 12, p. 1673-1675 https://doi.org/10.1063/1.122241	journal	September 1998
Silicon microcolumn arrays grown by nanosecond pulsed-excimer laser irradiation Pedraza, A. J.; Fowlkes, J. D.; Lowndes, D. H. Applied Physics Letters, Vol. 74, Issue 16, p. 2322-2324 https://doi.org/10.1063/1.123838	journal	April 1999
Visible luminescence from silicon surfaces microstructured in air Wu, C.; Crouch, C. H.; Zhao, L. Applied Physics Letters, Vol. 81, Issue 11, p. 1999-2001 https://doi.org/10.1063/1.1504868	journal	September 2002

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Manufacture of silicon-based devices having disordered sulfur-doped surface layers

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