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Title: Precision shape modification of nanodevices with a low-energy electron beam

Abstract

Methods of shape modifying a nanodevice by contacting it with a low-energy focused electron beam are disclosed here. In one embodiment, a nanodevice may be permanently reformed to a different geometry through an application of a deforming force and a low-energy focused electron beam. With the addition of an assist gas, material may be removed from the nanodevice through application of the low-energy focused electron beam. The independent methods of shape modification and material removal may be used either individually or simultaneously. Precision cuts with accuracies as high as 10 nm may be achieved through the use of precision low-energy Scanning Electron Microscope scan beams. These methods may be used in an automated system to produce nanodevices of very precise dimensions. These methods may be used to produce nanodevices of carbon-based, silicon-based, or other compositions by varying the assist gas.

Inventors:
 [1];  [2];  [2]
  1. Kensington, CA
  2. Berkeley, CA
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1014500
Patent Number(s):
7,674,389
Application Number:
US Patent Application 11/260,021
Assignee:
The Regents of the University of California (Oakland, CA)
DOE Contract Number:  
AC02-05CH11231
Resource Type:
Patent
Country of Publication:
United States
Language:
English

Citation Formats

Zettl, Alex, Yuzvinsky, Thomas David, and Fennimore, Adam. Precision shape modification of nanodevices with a low-energy electron beam. United States: N. p., 2010. Web.
Zettl, Alex, Yuzvinsky, Thomas David, & Fennimore, Adam. Precision shape modification of nanodevices with a low-energy electron beam. United States.
Zettl, Alex, Yuzvinsky, Thomas David, and Fennimore, Adam. Tue . "Precision shape modification of nanodevices with a low-energy electron beam". United States. https://www.osti.gov/servlets/purl/1014500.
@article{osti_1014500,
title = {Precision shape modification of nanodevices with a low-energy electron beam},
author = {Zettl, Alex and Yuzvinsky, Thomas David and Fennimore, Adam},
abstractNote = {Methods of shape modifying a nanodevice by contacting it with a low-energy focused electron beam are disclosed here. In one embodiment, a nanodevice may be permanently reformed to a different geometry through an application of a deforming force and a low-energy focused electron beam. With the addition of an assist gas, material may be removed from the nanodevice through application of the low-energy focused electron beam. The independent methods of shape modification and material removal may be used either individually or simultaneously. Precision cuts with accuracies as high as 10 nm may be achieved through the use of precision low-energy Scanning Electron Microscope scan beams. These methods may be used in an automated system to produce nanodevices of very precise dimensions. These methods may be used to produce nanodevices of carbon-based, silicon-based, or other compositions by varying the assist gas.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2010},
month = {3}
}

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