Nanocomposite films

Mitlin, David; Ophus, Colin; Evoy, Stephane; Radmilovic, Velimir; Mohammadi, Reza; Westra, Ken; Nelson-Fitzpatrick, Nathaniel; Lee, Zonghoon

Nanocomposite films

Patent · 20 July 2010

OSTI ID:1012825

Mitlin, David ^[1]; Ophus, Colin ^[1]; Evoy, Stephane ^[1]; Radmilovic, Velimir ^[2]; Mohammadi, Reza ^[1]; Westra, Ken ^[1]; Nelson-Fitzpatrick, Nathaniel ^[1]; Lee, Zonghoon ^[3]

Edmonton, CA
Piedmont, CA
Albany, CA

A thin-film composition of nanocrystal molybdenum in an amorphous metallic matrix may be formed by co-sputtering Mo with aluminum or nickel. NEMS cantilevers may be formed from the film. The films exhibit high nanoindentation hardness and a reduction in roughness and intrinsic stress, while maintaining resistivity in the metallic range.

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Research Organization:: The Governors of the University of Alberta (Edmonton, Alberta, CA); The University of California (Oakland, CA)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC03-76SF00098

Assignee:: The Governors of the University of Alberta (Edmonton, Alberta, CA) The University of California (Oakland, CA)

Patent Number(s):: 7,758,708

Application Number:: 11/831,434

OSTI ID:: 1012825

Country of Publication:: United States

Language:: English

References (38)

Phase selection in magnetron sputter-deposited TiAl alloy Wang, S. Z.; Shao, G.; Tsakiropoulos, P. Materials Science and Engineering: A, Vol. 329-331 https://doi.org/10.1016/S0921-5093(01)01548-9	journal	June 2002
Nanostructured Al–Fe alloys produced by e-beam deposition: static and dynamic tensile properties Mukai, T.; Suresh, S.; Kita, K. Acta Materialia, Vol. 51, Issue 14 https://doi.org/10.1016/S1359-6454(03)00237-4	journal	August 2003
Metastable alloy phases by co-sputtering Cantor, B.; Cahn, R. W. Acta Metallurgica, Vol. 24, Issue 9 https://doi.org/10.1016/0001-6160(76)90051-1	journal	September 1976
Materials issues in microelectromechanical devices: science, engineering, manufacturability and reliability Romig, A. D.; Dugger, Michael T.; McWhorter, Paul J. Acta Materialia, Vol. 51, Issue 19 https://doi.org/10.1016/S1359-6454(03)00440-3	journal	November 2003
New amorphous alloys resistant to high temperature corrosion Habazaki, H.; Takahiro, K.; Yamaguchi, S. Materials Science and Engineering: A, Vol. 181-182 https://doi.org/10.1016/0921-5093(94)90810-9	journal	May 1994
Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology Oliver, W. C.; Pharr, G. M. Journal of Materials Research, Vol. 19, Issue 1 https://doi.org/10.1557/jmr.2004.19.1.3	journal	January 2004
Activation analysis of deformation in evaporated molybdenum thin films Yoder, K. B.; Elmustafa, A. A.; Lin, J. C. Journal of Physics D: Applied Physics, Vol. 36, Issue 7 https://doi.org/10.1088/0022-3727/36/7/318	journal	March 2003
Deposition of highly supersaturated metastable aluminium-molybdenum alloys by closed field unbalanced magnetron sputtering Bates, Ri; Abu-Zeid, Oa Vacuum, Vol. 47, Issue 2 https://doi.org/10.1016/0042-207X(95)00217-0	journal	February 1996
Nanomechanical hydrogen sensing Huang, X. M. H.; Manolidis, M.; Jun, Seong Chan Applied Physics Letters, Vol. 86, Issue 14 https://doi.org/10.1063/1.1897445	journal	April 2005
Anodic behaviour of Al-refractory metal amorphous alloys Wolowik, A.; Janik-Czachor, M. Materials Science and Engineering: A, Vol. 267, Issue 2 https://doi.org/10.1016/S0921-5093(99)00106-9	journal	July 1999
Passivity and its breakdown in Al-based amorphous alloys Janik-Czachor, M.; Jaskiewicz, A.; Dolata, M. Materials Chemistry and Physics, Vol. 92, Issue 2-3 https://doi.org/10.1016/j.matchemphys.2004.11.017	journal	August 2005
TiNi-based thin films in MEMS applications: a review Fu, Yongqing; Du, Hejun; Huang, Weimin Sensors and Actuators A: Physical, Vol. 112, Issue 2-3 https://doi.org/10.1016/j.sna.2004.02.019	journal	May 2004
Formation of metastable alloy films in the Ni-Mo binary system by ion-beam-assisted deposition Zhao, B.; Zeng, F.; Pan, F. Applied Physics A, Vol. 77, Issue 3-4 https://doi.org/10.1007/s00339-002-1482-9	journal	August 2003
Nanoindentation of nanocrystalline Ni with geometrically different indenters Mirshams, Reza A.; Parakala, Padma Materials Science and Engineering: A, Vol. 372, Issue 1-2 https://doi.org/10.1016/j.msea.2004.01.010	journal	May 2004
Macroscopic model for columnar growth of amorphous films by sputter deposition Bales, G. S.; Zangwill, A. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 9, Issue 1 https://doi.org/10.1116/1.577116	journal	January 1991
Nanoelectromechanical systems Ekinci, K. L.; Roukes, M. L. Review of Scientific Instruments, Vol. 76, Issue 6, Article No. 061101 https://doi.org/10.1063/1.1927327	journal	June 2005
Silicon carbide MEMS for harsh environments Mehregany, M.; Zorman, C. A.; Rajan, N. Proceedings of the IEEE, Vol. 86, Issue 8 https://doi.org/10.1109/5.704265	journal	January 1998
Local icosahedral symmetries in Al-Mo alloys prepared by ball milling Monagheddu, M.; Delogu, F.; Schiffini, L. Nanostructured Materials, Vol. 11, Issue 8 https://doi.org/10.1016/S0965-9773(99)00416-X	journal	November 1999
Cohesion in alloys — fundamentals of a semi-empirical model Miedema, A. R.; de Châtel, P. F.; de Boer, F. R. Physica B+C, Vol. 100, Issue 1 https://doi.org/10.1016/0378-4363(80)90054-6	journal	April 1980
Effect of grain size on friction and wear of nanocrystalline aluminum Farhat, Z. N.; Ding, Y.; Northwood, D. O. Materials Science and Engineering: A, Vol. 206, Issue 2 https://doi.org/10.1016/0921-5093(95)10016-4	journal	February 1996
Nanostructures and Mechanical Properties of Bulk Al-Fe Alloys Prepared by Electron-Beam Deposition Sasaki, Hiroyuki; Kita, Kazuhiko; Nagahora, Junichi MATERIALS TRANSACTIONS, Vol. 42, Issue 8 https://doi.org/10.2320/matertrans.42.1561	journal	January 2001
Nanomechanical resonant structures in silicon nitride: fabrication, operation and dissipation issues Sekaric, L.; Carr, D. W.; Evoy, S. Sensors and Actuators A: Physical, Vol. 101, Issue 1-2 https://doi.org/10.1016/S0924-4247(02)00149-8	journal	September 2002
The Electrical Resistance of Binary Metallic Mixtures Landauer, Rolf Journal of Applied Physics, Vol. 23, Issue 7 https://doi.org/10.1063/1.1702301	journal	July 1952
Nanoscale enrichments of substrate elements in the growth of thin oxide films Habazaki, H.; Shimizu, K.; Skeldon, P. Corrosion Science, Vol. 39, Issue 4 https://doi.org/10.1016/S0010-938X(97)89339-0	journal	April 1997
Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals Cleland, A. N.; Roukes, M. L. Applied Physics Letters, Vol. 69, Issue 18 https://doi.org/10.1063/1.117548	journal	October 1996
Simulation of faceted film growth in three dimensions: microstructure, morphology and texture Smereka, Peter; Li, Xingquan; Russo, Giovanni Acta Materialia, Vol. 53, Issue 4 https://doi.org/10.1016/j.actamat.2004.11.013	journal	February 2005
Intermetallic phases produced by the heat treatment of mechanically alloyed AlMo powders Zdujić, M.; Poleti, D.; Karanović, Lj. Materials Science and Engineering: A, Vol. 185, Issue 1-2 https://doi.org/10.1016/0921-5093(94)90930-X	journal	September 1994
The electrical resistivity and deviations from Matthiessen's rule of single-crystal pure Cd and dilute Cd-Mg alloys Rowlands, J. A.; Stackhouse, B. J.; Woods, S. B. Journal of Physics F: Metal Physics, Vol. 8, Issue 12 https://doi.org/10.1088/0305-4608/8/12/014	journal	December 1978
Anodic film formation on a sputter-deposited Al-30at%Mo alloy Habazaki, H.; Skeldon, P.; Shimizu, K. Corrosion Science, Vol. 37, Issue 9 https://doi.org/10.1016/0010-938X(95)00061-N	journal	September 1995
Sliding wear study of ion-beam mixing NiMo multilayer films on steel Zhang, Wei; Zhang, Xushou; Yang, Dehua Wear, Vol. 197, Issue 1-2 https://doi.org/10.1016/0043-1648(96)06958-X	journal	September 1996
Thin-film reactions of Al with Co, Cr, Mo, Ta, Ti, and W Colgan, E. G.; Mayer, J. W. Journal of Materials Research, Vol. 4, Issue 4 https://doi.org/10.1557/JMR.1989.0815	journal	August 1989
The Composition and Morphology of Anodic Films on Al-Mo Alloys Crossland, A. C. Journal of The Electrochemical Society, Vol. 144, Issue 3 https://doi.org/10.1149/1.1837499	journal	January 1997
Diffusion bonding in ultra fine-grained Al–Fe alloy indicating high-strain-rate superplasticity Somekawa, Hidetoshi; Tanaka, Tsutomu; Sasaki, Hiroyuki Acta Materialia, Vol. 52, Issue 4 https://doi.org/10.1016/j.actamat.2003.10.036	journal	February 2004
Near-zero curvature fabrication of miniaturized micromechanical Ni switches using electron beam cross-linked PMMA Teh, W. H.; Luo, J. K.; Graham, M. R. Journal of Micromechanics and Microengineering, Vol. 13, Issue 5 https://doi.org/10.1088/0960-1317/13/5/309	journal	May 2003
Measurement of mechanical resonance and losses in nanometer scale silicon wires Carr, Dustin W.; Evoy, S.; Sekaric, L. Applied Physics Letters, Vol. 75, Issue 7 https://doi.org/10.1063/1.124554	journal	August 1999
Effects of the substrate on the determination of thin film mechanical properties by nanoindentation Saha, Ranjana; Nix, William D. Acta Materialia, Vol. 50, Issue 1 https://doi.org/10.1016/S1359-6454(01)00328-7	journal	January 2002
Silicon as a mechanical material Petersen, K. E. Proceedings of the IEEE, Vol. 70, Issue 5 https://doi.org/10.1109/PROC.1982.12331	journal	May 1982
Microstructure control in semiconductor metallization Harper, J. M. E. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 4 https://doi.org/10.1116/1.589407	journal	July 1997

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Nanocomposite films

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