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Title: Method and system for treating an interior surface of a workpiece using a charged particle beam

Abstract

A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal cavity of the workpiece and is used to redirect the charged particle beam toward the interior surface to treat the interior surface.

Inventors:
Publication Date:
Research Org.:
TEL Epion Inc., Billerica, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1012601
Patent Number(s):
7,566,888
Application Number:
11/752,774
Assignee:
TEL Epion Inc. (Billerica, MA)
DOE Contract Number:  
FG02-04ER83944
Resource Type:
Patent
Resource Relation:
Patent File Date: 2007 May 23
Country of Publication:
United States
Language:
English

Citation Formats

Swenson, David Richard. Method and system for treating an interior surface of a workpiece using a charged particle beam. United States: N. p., 2007. Web.
Swenson, David Richard. Method and system for treating an interior surface of a workpiece using a charged particle beam. United States.
Swenson, David Richard. Wed . "Method and system for treating an interior surface of a workpiece using a charged particle beam". United States. https://www.osti.gov/servlets/purl/1012601.
@article{osti_1012601,
title = {Method and system for treating an interior surface of a workpiece using a charged particle beam},
author = {Swenson, David Richard},
abstractNote = {A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal cavity of the workpiece and is used to redirect the charged particle beam toward the interior surface to treat the interior surface.},
doi = {},
url = {https://www.osti.gov/biblio/1012601}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2007},
month = {5}
}

Patent:

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