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Title: Calibration of the modulation transfer function of surface profilometers with binary pseudo-random test standards: expanding the application range

Abstract

A modulation transfer function (MTF) calibration method based on binary pseudo-random (BPR) gratings and arrays [Proc. SPIE 7077-7 (2007), Opt. Eng. 47, 073602 (2008)] has been proven to be an effective MTF calibration method for a number of interferometric microscopes and a scatterometer [Nucl. Instr. and Meth. A616, 172 (2010)]. Here we report on a further expansion of the application range of the method. We describe the MTF calibration of a 6 inch phase shifting Fizeau interferometer. Beyond providing a direct measurement of the interferometer's MTF, tests with a BPR array surface have revealed an asymmetry in the instrument's data processing algorithm that fundamentally limits its bandwidth. Moreover, the tests have illustrated the effects of the instrument's detrending and filtering procedures on power spectral density measurements. The details of the development of a BPR test sample suitable for calibration of scanning and transmission electron microscopes are also presented. Such a test sample is realized as a multilayer structure with the layer thicknesses of two materials corresponding to BPR sequence. The investigations confirm the universal character of the method that makes it applicable to a large variety of metrology instrumentation with spatial wavelength bandwidths from a few nanometers to hundreds ofmore » millimeters.« less

Authors:
; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
Advanced Light Source Division; Engineering Division; Materials Sciences Division
OSTI Identifier:
1012479
Report Number(s):
LBNL-4527E
Journal ID: ISSN 0091-3286; OPEGAR; TRN: US1102293
DOE Contract Number:  
DE-AC02-05CH11231
Resource Type:
Journal Article
Journal Name:
Optical Engineering
Additional Journal Information:
Journal Name: Optical Engineering; Journal ID: ISSN 0091-3286
Country of Publication:
United States
Language:
English
Subject:
42; 46; 47; ALGORITHMS; ASYMMETRY; CALIBRATION; DATA PROCESSING; ELECTRON MICROSCOPES; MICROSCOPES; MODULATION; SPECTRAL DENSITY; TRANSFER FUNCTIONS; WAVELENGTHS; surface metrology, binary pseudo-random, modulation transfer function, power spectral density, calibration, surface profilometer, interferometer, scanning electron microscope, SEM, transmission electron microscope, TEM

Citation Formats

Yashchuk, Valeriy V., Anderson, Erik H., Barber, Samuel K., Bouet, Nathalie, Cambie, Rossana, Conley, Raymond, McKinney, Wayne R., Takacs, Peter Z., and Voronov, Dmitriy L. Calibration of the modulation transfer function of surface profilometers with binary pseudo-random test standards: expanding the application range. United States: N. p., 2011. Web.
Yashchuk, Valeriy V., Anderson, Erik H., Barber, Samuel K., Bouet, Nathalie, Cambie, Rossana, Conley, Raymond, McKinney, Wayne R., Takacs, Peter Z., & Voronov, Dmitriy L. Calibration of the modulation transfer function of surface profilometers with binary pseudo-random test standards: expanding the application range. United States.
Yashchuk, Valeriy V., Anderson, Erik H., Barber, Samuel K., Bouet, Nathalie, Cambie, Rossana, Conley, Raymond, McKinney, Wayne R., Takacs, Peter Z., and Voronov, Dmitriy L. Mon . "Calibration of the modulation transfer function of surface profilometers with binary pseudo-random test standards: expanding the application range". United States. https://www.osti.gov/servlets/purl/1012479.
@article{osti_1012479,
title = {Calibration of the modulation transfer function of surface profilometers with binary pseudo-random test standards: expanding the application range},
author = {Yashchuk, Valeriy V. and Anderson, Erik H. and Barber, Samuel K. and Bouet, Nathalie and Cambie, Rossana and Conley, Raymond and McKinney, Wayne R. and Takacs, Peter Z. and Voronov, Dmitriy L.},
abstractNote = {A modulation transfer function (MTF) calibration method based on binary pseudo-random (BPR) gratings and arrays [Proc. SPIE 7077-7 (2007), Opt. Eng. 47, 073602 (2008)] has been proven to be an effective MTF calibration method for a number of interferometric microscopes and a scatterometer [Nucl. Instr. and Meth. A616, 172 (2010)]. Here we report on a further expansion of the application range of the method. We describe the MTF calibration of a 6 inch phase shifting Fizeau interferometer. Beyond providing a direct measurement of the interferometer's MTF, tests with a BPR array surface have revealed an asymmetry in the instrument's data processing algorithm that fundamentally limits its bandwidth. Moreover, the tests have illustrated the effects of the instrument's detrending and filtering procedures on power spectral density measurements. The details of the development of a BPR test sample suitable for calibration of scanning and transmission electron microscopes are also presented. Such a test sample is realized as a multilayer structure with the layer thicknesses of two materials corresponding to BPR sequence. The investigations confirm the universal character of the method that makes it applicable to a large variety of metrology instrumentation with spatial wavelength bandwidths from a few nanometers to hundreds of millimeters.},
doi = {},
journal = {Optical Engineering},
issn = {0091-3286},
number = ,
volume = ,
place = {United States},
year = {2011},
month = {3}
}