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Title: Thermal and Electromigration-Induced Strains in Copper Conductor Lines: X-ray Microbeam Measurements and Analysis

Conference ·
OSTI ID:1009001

No abstract prepared.

Research Organization:
Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
Sponsoring Organization:
USDOE
OSTI ID:
1009001
Resource Relation:
Conference: Materials, Technology and Reliability of Low-k Dielectrics and Copper Interconnects;April 17 - 21, 2006;San Francisco, CA
Country of Publication:
United States
Language:
ENGLISH