Method for making dense crack free thin films
Patent
·
OSTI ID:1007932
- Lafayette, CA
- Berkeley, CA
The process described herein provides a simple and cost effective method for making crack free, high density thin ceramic film. The steps involve depositing a layer of a ceramic material on a porous or dense substrate. The deposited layer is compacted and then the resultant laminate is sintered to achieve a higher density than would have been possible without the pre-firing compaction step.
- Research Organization:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC03-76SF00098;
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Number(s):
- 7,163,713
- Application Number:
- 10/162,511
- OSTI ID:
- 1007932
- Country of Publication:
- United States
- Language:
- English
Improved preparation procedure and properties for a multilayer piezoelectric thick-film actuator
|
journal | November 1998 |
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