Nucleation and Growth of MOCVD Grown (Cr, Zn)O Films: Uniform Doping vs Secondary Phase Formation
- PNNL
We have investigated Cr solubility and secondary phase formation in metallorganic chemical vapor deposition (MOCVD) grown (Cr, Zn)O films on Si(100). Simultaneous deposition of 0.15 M Cr(TMHD) and 0.025 M Zn(TMHD) precursors in an oxidizing environment with a flow ratio of 1:10 resulted in secondary phase formation rather than uniform Cr doping. Based on several surface and microstructural techniques, we have identified nanocrystalline ZnCr{sub 2}O{sub 4} and disordered Cr{sub 2}O{sub 3} as the secondary Cr-containing phases. Analysis suggests that ZnCr{sub 2}O{sub 4} crystallites are dispersed throughout the film, and that disordered Cr{sub 2}O{sub 3} layer may form at the interface. These results are consistent with the tendency of Cr to exhibit octahedral, rather than tetrahedral coordination with O.
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
- Sponsoring Organization:
- USDOE
- OSTI ID:
- 1007555
- Journal Information:
- J. Electrochem. Soc., Vol. 154, Issue (3) ; 2007; ISSN 0013-4651
- Country of Publication:
- United States
- Language:
- ENGLISH
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