Structural analysis of DC magnetron sputtered and spin coated thin films using RBS, TEM and X-ray reflectivity methods
Journal Article
·
· Nucl. Instrum. Methods B
- UCSD
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
- Sponsoring Organization:
- USDOE
- OSTI ID:
- 1006873
- Journal Information:
- Nucl. Instrum. Methods B, Vol. 266, Issue (8) ; 04, 2008
- Country of Publication:
- United States
- Language:
- ENGLISH
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