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Title: A biomimetic approach to the deposition of ZrO 2 films on self-assembled nanoscale templates

Abstract

Zirconium oxide thin films were deposited on a phosphonate-terminated self-assembled monolayer (SAM) on a single crystal silicon substrate by a hydrolysis of zirconium sulfate solution in acid environment at 80 C. The ZrO{sub 2} films consist of tetragonal ZrO{sub 2} crystallites with a size of 5-10 nm. Surface nucleation and attraction between the SAM surface and bulk precipitates in solution can explain the film formation. In both mechanisms, the surface functionality of the SAM plays a crucial role. This deposition approach was inspired by biomineralization through controlled deposition of inorganic solids on an ordered organic matrix. Microstructures and mechanical properties of the ZrO{sub 2} thin films were studied using scanning electron microscope (SEM), cross-sectional transmission electron microscope (TEM) and nanoindentation. Microstructures were tailored at different stages of the film growth, as well as with processing parameters and substrate surface conditions. The nanoindentation modulus and hardness of the as-deposited ZrO{sub 2} films were much lower than those of the bulk ZrO{sub 2}. The addition of extra pressure during this process, however, restores mechanical properties of ZrO{sub 2} films.

Authors:
 [1];  [2];  [2];  [2];  [2];  [1]
  1. State University of New York, Binghamton
  2. ORNL
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); High Temperature Materials Laboratory
Sponsoring Org.:
USDOE Office of Energy Efficiency and Renewable Energy (EERE)
OSTI Identifier:
1003327
DOE Contract Number:
DE-AC05-00OR22725
Resource Type:
Journal Article
Resource Relation:
Journal Name: Materials Science and Engineering C: Biomimetic materials, sensors and systems; Journal Volume: 26; Journal Issue: 8
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ZIRCONIUM OXIDES; THIN FILMS; SILICON; SUBSTRATES; ZIRCONIUM SULFATES; HYDROLYSIS; MICROSTRUCTURE; MECHANICAL PROPERTIES

Citation Formats

Zhang, Guangneng, Howe, Jane Y, Coffey, Dorothy W, Blom, Douglas Allen, Allard Jr, Lawrence Frederick, and Cho, Junghyun. A biomimetic approach to the deposition of ZrO2 films on self-assembled nanoscale templates. United States: N. p., 2006. Web. doi:10.1016/j.msec.2005.08.010.
Zhang, Guangneng, Howe, Jane Y, Coffey, Dorothy W, Blom, Douglas Allen, Allard Jr, Lawrence Frederick, & Cho, Junghyun. A biomimetic approach to the deposition of ZrO2 films on self-assembled nanoscale templates. United States. doi:10.1016/j.msec.2005.08.010.
Zhang, Guangneng, Howe, Jane Y, Coffey, Dorothy W, Blom, Douglas Allen, Allard Jr, Lawrence Frederick, and Cho, Junghyun. Sun . "A biomimetic approach to the deposition of ZrO2 films on self-assembled nanoscale templates". United States. doi:10.1016/j.msec.2005.08.010.
@article{osti_1003327,
title = {A biomimetic approach to the deposition of ZrO2 films on self-assembled nanoscale templates},
author = {Zhang, Guangneng and Howe, Jane Y and Coffey, Dorothy W and Blom, Douglas Allen and Allard Jr, Lawrence Frederick and Cho, Junghyun},
abstractNote = {Zirconium oxide thin films were deposited on a phosphonate-terminated self-assembled monolayer (SAM) on a single crystal silicon substrate by a hydrolysis of zirconium sulfate solution in acid environment at 80 C. The ZrO{sub 2} films consist of tetragonal ZrO{sub 2} crystallites with a size of 5-10 nm. Surface nucleation and attraction between the SAM surface and bulk precipitates in solution can explain the film formation. In both mechanisms, the surface functionality of the SAM plays a crucial role. This deposition approach was inspired by biomineralization through controlled deposition of inorganic solids on an ordered organic matrix. Microstructures and mechanical properties of the ZrO{sub 2} thin films were studied using scanning electron microscope (SEM), cross-sectional transmission electron microscope (TEM) and nanoindentation. Microstructures were tailored at different stages of the film growth, as well as with processing parameters and substrate surface conditions. The nanoindentation modulus and hardness of the as-deposited ZrO{sub 2} films were much lower than those of the bulk ZrO{sub 2}. The addition of extra pressure during this process, however, restores mechanical properties of ZrO{sub 2} films.},
doi = {10.1016/j.msec.2005.08.010},
journal = {Materials Science and Engineering C: Biomimetic materials, sensors and systems},
number = 8,
volume = 26,
place = {United States},
year = {Sun Jan 01 00:00:00 EST 2006},
month = {Sun Jan 01 00:00:00 EST 2006}
}