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Title: SOI detector with drift field due to majority carrier flow - an alternative to biasing in depletion

Abstract

This paper reports on a SOI detector with drift field induced by the flow of majority carriers. It is proposed as an alternative method of detector biasing compared to standard depletion. N-drift rings in n-substrate are used at the front side of the detector to provide charge collecting field in depth as well as to improve the lateral charge collection. The concept was verified on a 2.5 x 2.5 mm{sup 2} large detector array with 20 {micro}m and 40 {micro}m pixel pitch fabricated in August 2009 using the OKI semiconductor process. First results, obtained with a radioactive source to demonstrate spatial resolution and spectroscopic performance of the detector for the two different pixel sizes will be shown and compared to results obtained with a standard depletion scheme. Two different diode designs, one using a standard p-implantation and one surrounded by an additional BPW implant will be compared as well.

Authors:
; ;
Publication Date:
Research Org.:
Fermi National Accelerator Lab. (FNAL), Batavia, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1002008
Report Number(s):
FERMILAB-CONF-10-475-E-PPD
TRN: US1100470
DOE Contract Number:  
AC02-07CH11359
Resource Type:
Conference
Resource Relation:
Conference: Presented at 2010 IEEE Nuclear Science Symposium, Medical Imaging Conference, and 17th Room Temperature Semiconductor Detectors Workshop, Knoxville, Tennessee, 30 Oct - 6 Nov 2010
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; CHARGE COLLECTION; PERFORMANCE; SEMICONDUCTOR DETECTORS; SPATIAL RESOLUTION; Instrumentation

Citation Formats

Trimpl, M, Deptuch, G, Yarema, R, and /Fermilab. SOI detector with drift field due to majority carrier flow - an alternative to biasing in depletion. United States: N. p., 2010. Web.
Trimpl, M, Deptuch, G, Yarema, R, & /Fermilab. SOI detector with drift field due to majority carrier flow - an alternative to biasing in depletion. United States.
Trimpl, M, Deptuch, G, Yarema, R, and /Fermilab. 2010. "SOI detector with drift field due to majority carrier flow - an alternative to biasing in depletion". United States. https://www.osti.gov/servlets/purl/1002008.
@article{osti_1002008,
title = {SOI detector with drift field due to majority carrier flow - an alternative to biasing in depletion},
author = {Trimpl, M and Deptuch, G and Yarema, R and /Fermilab},
abstractNote = {This paper reports on a SOI detector with drift field induced by the flow of majority carriers. It is proposed as an alternative method of detector biasing compared to standard depletion. N-drift rings in n-substrate are used at the front side of the detector to provide charge collecting field in depth as well as to improve the lateral charge collection. The concept was verified on a 2.5 x 2.5 mm{sup 2} large detector array with 20 {micro}m and 40 {micro}m pixel pitch fabricated in August 2009 using the OKI semiconductor process. First results, obtained with a radioactive source to demonstrate spatial resolution and spectroscopic performance of the detector for the two different pixel sizes will be shown and compared to results obtained with a standard depletion scheme. Two different diode designs, one using a standard p-implantation and one surrounded by an additional BPW implant will be compared as well.},
doi = {},
url = {https://www.osti.gov/biblio/1002008}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Nov 01 00:00:00 EDT 2010},
month = {Mon Nov 01 00:00:00 EDT 2010}
}

Conference:
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