Smoothing of mirror substrates by thin-film deposition
Superpolished optical flats with high spatial frequency roughness below 0.1 nm have been commercially available for years. However, it is much more difficult to obtain figured optics of similar quality. We have obtained and tested the finish of figured optics from different vendors by atomic force microscopy and optical profilometry and have investigated how the substrate quality can be improved by the deposition of thin films. We have determined the growth parameters of several thin-film structures. From these parameters we can determine how the surface topography of a coated mirror differs from that of the substrate, select the best thin-film structure, and predict the possible improvement. Keywords: Smoothing films, multilayer coatings, finish of mirror substrates
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE Office of Defense Programs (DP) (US)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 9864
- Report Number(s):
- UCRL-JC-135146; TRN: US0103221
- Resource Relation:
- Conference: 44th Annual Meeting of the International Symposium on Optical, Science, Engineering and Instrumentation, SPIE/Soft X-Ray Coatings, Aspherics, and Applications, Denver, CO (US), 07/18/1999--07/23/1999; Other Information: PBD: 3 Aug 1999
- Country of Publication:
- United States
- Language:
- English
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