Thin Silicon MEMS Contact-Stress Sensor
Conference
·
OSTI ID:984646
This thin, MEMS contact-stress sensor continuously and accurately measures time-varying, solid interface loads over tens of thousands of load cycles. The contact-stress sensor is extremely thin (150 {mu}m) and has a linear output with an accuracy of {+-} 1.5% FSO.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 984646
- Report Number(s):
- LLNL-PROC-433955; TRN: US201016%%1413
- Resource Relation:
- Conference: Presented at: Hilton Head Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, United States, Jun 06 - Jun 10, 2010
- Country of Publication:
- United States
- Language:
- English
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