Investigation of the current resolution limits of advanced EUVresists

Technical Report · Tue Nov 01 00:00:00 EST 2005

DOI:https://doi.org/10.2172/898285· OSTI ID:898285

Naulleau, Patrick; Rammeloo, Clemens; Cain, Jason P; Dean, Kim; Denham, Paul; Goldberg, Kenneth A; Hoef, Brian; La Fontaine, Bruno; Pawloski, Adam; Larson, Carl; Wallraff, Greg

No abstract prepared.

• Research Organization: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
• Sponsoring Organization: USDOE Director. Office of Science. Office of AdvancedScientific Computing Research. Office of Basic EnergySciences
• DOE Contract Number: DE-AC02-05CH11231
• OSTI ID: 898285
• Report Number(s): LBNL-60345; R&D Project: 509201; BnR: KC0202030; TRN: US200703%%341
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
RESOLUTION
LIMITING VALUES
MASKING
EXTREME ULTRAVIOLET RADIATION