skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Surface treatment of ceramic articles

Patent ·
OSTI ID:872052
 [1];  [2];  [3];  [4];  [4];  [5]
  1. Orinda, CA
  2. Berkeley, CA
  3. Daly City, CA
  4. Albany, CA
  5. Morgan Hill, CA
+ Show Author Affiliations

A process for producing an article with improved ceramic surface properties including providing an article having a ceramic surface, and placing the article onto a conductive substrate holder in a hermetic enclosure. Thereafter a low pressure ambient is provided in the hermetic enclosure. A plasma including ions of solid materials is produced the ceramic surface of the article being at least partially immersed in a macroparticle free region of the plasma. While the article is immersed in the macroparticle free region, a bias of the substrate holder is biased between a low voltage at which material from the plasma condenses on the surface of the article and a high negative voltage at which ions from the plasma are implanted into the article.

Research Organization:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
DOE Contract Number:
AC03-76SF00098
Assignee:
Regents of University of California (Oakland, CA); IBM (San Jose, CA)
Patent Number(s):
US 5851475
OSTI ID:
872052
Country of Publication:
United States
Language:
English

References (5)

Plasma synthesis of metallic and composite thin films with atomically mixed substrate bonding journal January 1993
Macroparticle‐free thin films produced by an efficient vacuum arc deposition technique journal September 1993
Novel metal ion surface modification technique journal April 1991
Joining of Metal Films to Carbon-Carbon Composite Material by Metal Plasma Immersion Ion Implantation journal January 1993
Low Energy Ion Implantation / Deposition as a Film Synthesis and Bonding Tool journal January 1993

Similar Records

Surface treatment of ceramic articles
Patent · Tue Dec 22 00:00:00 EST 1998 · OSTI ID:872052
+3 more
Surface treatment of magnetic recording heads
Patent · Tue Dec 19 00:00:00 EST 1995 · OSTI ID:872052
+3 more
Surface treatment of magnetic recording heads
Patent · Thu Jan 01 00:00:00 EST 1998 · OSTI ID:872052
+3 more

Related Subjects

surface
treatment
ceramic
articles
process
producing
article
improved
properties
including
providing
placing
conductive
substrate
holder
hermetic
enclosure
thereafter
pressure
ambient
provided
plasma
solid
materials
produced
partially
immersed
macroparticle
free
region
bias
biased
voltage
material
condenses
negative
implanted
negative voltage
substrate holder
conductive substrate
ceramic article
solid materials
solid material
surface properties
ceramic articles
properties including
surface treatment
plasma including
partially immersed
ceramic surface
free region
improved ceramic
/264/