Efficient airflow design for cleanrooms improves business bottom lines
Based on a review of airflow design factors and in-situ energy measurements in ISO Cleanliness Class-5 cleanrooms, this paper addresses the importance of energy efficiency in airflow design and opportunities of cost savings in cleanroom practices. The paper discusses design factors that can long lastingly affect cleanroom system performance, and demonstrates benefits of energy efficient cleanroom design from viewpoints of environmental control and business operations. The paper suggests that a high performance cleanroom should not only be effective in contamination control, but also be efficient in energy and environmental performance. The paper also suggests that energy efficient design practice stands to bring in immediate capital cost savings and operation cost savings, and should be regarded by management as a strategy to improve business bottom lines.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE. Assistant Secretary for Energy Efficiency and Renweable Energy. Office of the Building Technologies Program; California Institute for Energy EFficiency. University of California
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 842509
- Report Number(s):
- LBNL-52004; R&D Project: 884602; TRN: US200516%%89
- Resource Relation:
- Conference: ESTECH 2003: The 49th Annual Technical Meeting of the IEST, Phoenix, AZ, May 19-21, 2003
- Country of Publication:
- United States
- Language:
- English
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