Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films
Supercritical carbon dioxide (SCCO2) extraction of a CO{sub 2}-soluble poly(propylene glycol) (PPG) porogen from poly(methylsilsesquioxane) (PMSSQ) cured to temperatures adequate to initiate matrix condensation, but still below the decomposition temperature of the porogen is demonstrated to produce nanoporous, ultralow dielectric constant thin films. Both closed and open cell porous structures were prepared simply by varying the porogen load in the organic/inorganic hybrid films. The porogen loads investigated in the present work ranged from 25-55 wt.%. Structural characterization of the samples conducted using transmission electron microscope (TEM), small angle X-ray scattering (SAXS) and Fourier transform infrared spectroscopy (FTIR) confirms the successful extraction of the porogen from the PMSSQ matrix at relatively low temperatures ({le} 200 C). The standard thermal decomposition process is performed at much higher temperatures (typically in the range of 400 C-450 C). The values of dielectric constants and refractive indices measured are in good agreement with the structural properties of these samples.
- Research Organization:
- SLAC National Accelerator Lab., Menlo Park, CA (United States)
- Sponsoring Organization:
- USDOE Office of Science (US)
- DOE Contract Number:
- AC03-76SF00515
- OSTI ID:
- 813355
- Report Number(s):
- SLAC-PUB-9990; TRN: US200316%%132
- Resource Relation:
- Other Information: PBD: 20 Jun 2003
- Country of Publication:
- United States
- Language:
- English
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