Cathodic arc plasma deposition
Abstract
No abstract prepared.
- Authors:
- Publication Date:
- Research Org.:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- Administrator for National Nuclear Security Admin. Nonproliferation and National Security Program Direction (US)
- OSTI Identifier:
- 810482
- Report Number(s):
- LBNL-49915
R&D Project: Z2N110; TRN: US0302793
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Journal Article
- Journal Name:
- Vacuum Technology & Coating
- Additional Journal Information:
- Journal Volume: 3; Other Information: Journal Publication Date: May 2002; PBD: 30 May 2002
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; DEPOSITION; PLASMA; LAWRENCE BERKELEY LABORATORY
Citation Formats
Anders, Andre. Cathodic arc plasma deposition. United States: N. p., 2002.
Web.
Anders, Andre. Cathodic arc plasma deposition. United States.
Anders, Andre. 2002.
"Cathodic arc plasma deposition". United States. https://www.osti.gov/servlets/purl/810482.
@article{osti_810482,
title = {Cathodic arc plasma deposition},
author = {Anders, Andre},
abstractNote = {No abstract prepared.},
doi = {},
url = {https://www.osti.gov/biblio/810482},
journal = {Vacuum Technology & Coating},
number = ,
volume = 3,
place = {United States},
year = {Thu May 30 00:00:00 EDT 2002},
month = {Thu May 30 00:00:00 EDT 2002}
}
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