skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Cathodic arc plasma deposition

Abstract

No abstract prepared.

Authors:
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
Administrator for National Nuclear Security Admin. Nonproliferation and National Security Program Direction (US)
OSTI Identifier:
810482
Report Number(s):
LBNL-49915
R&D Project: Z2N110; TRN: US0302793
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Journal Article
Journal Name:
Vacuum Technology & Coating
Additional Journal Information:
Journal Volume: 3; Other Information: Journal Publication Date: May 2002; PBD: 30 May 2002
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; DEPOSITION; PLASMA; LAWRENCE BERKELEY LABORATORY

Citation Formats

Anders, Andre. Cathodic arc plasma deposition. United States: N. p., 2002. Web.
Anders, Andre. Cathodic arc plasma deposition. United States.
Anders, Andre. 2002. "Cathodic arc plasma deposition". United States. https://www.osti.gov/servlets/purl/810482.
@article{osti_810482,
title = {Cathodic arc plasma deposition},
author = {Anders, Andre},
abstractNote = {No abstract prepared.},
doi = {},
url = {https://www.osti.gov/biblio/810482}, journal = {Vacuum Technology & Coating},
number = ,
volume = 3,
place = {United States},
year = {Thu May 30 00:00:00 EDT 2002},
month = {Thu May 30 00:00:00 EDT 2002}
}