Thin film polycrystalline silicon solar cells. Quarterly technical progress report No. 3, 1 April 1980-30 June 1980
During this third quarter of the program, the high pressure plasma (hpp) deposition process has been thoroughly evaluated using SiHCl/sub 3/ and SiCl/sub 4/ silicon source gases, by the gas chromatographic analysis of the effluent gases from the reactor. Both the deposition efficiency and reactor throughput rate were found to be consistently higher for hpp mode of operation compared to conventional CVD mode. The figure of merit for various chlorosilanes as a silicon source gas for hpp deposition is discussed. A new continuous silicon film deposition scheme is developed, and system design is initiated. This new system employs gas interlocks and eliminates the need for gas curtains which have been found to be problematic. Solar cells (2 cm x 2 cm area) with AM1 efficiencies of up to 12% were fabricated on RTR grain enhanced hpp deposited films. The parameters of a 12% cell under simulated AM1 illumination were: V/sub OC/ = 0.582 volts, J/sub SC/ = 28.3 mA/cm/sup 2/ and F.F. = 73.0%.
- Research Organization:
- Motorola, Inc., Phoenix, AZ (USA)
- DOE Contract Number:
- AC02-77CH00178
- OSTI ID:
- 6774827
- Report Number(s):
- SERI/PR-8277-1-T1
- Country of Publication:
- United States
- Language:
- English
Similar Records
Thin film polycrystalline silicon solar cells. Quarterly technical progress report No. 2, 1 January 1980-31 March 1980
Thin films of silicon on low-cost substrates. Annual report, 1 July 1976-30 June 1977
Related Subjects
36 MATERIALS SCIENCE
SILICON
DEPOSITION
SILICON SOLAR CELLS
FABRICATION
PERFORMANCE
CHEMICAL REACTORS
ELECTRICAL PROPERTIES
EQUILIBRIUM
FILMS
GRAIN SIZE
POLYCRYSTALS
RESEARCH PROGRAMS
RIBBON-TO-RIBBON METHOD
SILANES
THERMODYNAMIC PROPERTIES
CRYSTAL GROWTH METHODS
CRYSTAL STRUCTURE
CRYSTALS
DIRECT ENERGY CONVERTERS
ELEMENTS
EQUIPMENT
HYDRIDES
HYDROGEN COMPOUNDS
MICROSTRUCTURE
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
SEMIMETALS
SILICON COMPOUNDS
SIZE
SOLAR CELLS
SOLAR EQUIPMENT
140501* - Solar Energy Conversion- Photovoltaic Conversion
360601 - Other Materials- Preparation & Manufacture